Na ci gabaSiC Cantilever Paddledon Wafer Processing halitta ta vet-china yana ba da kyakkyawan bayani don masana'antar semiconductor. An yi wannan filafilin cantilever da kayan SiC (silicon carbide), kuma tsananin taurinsa da juriya na zafi yana ba shi damar kula da kyakkyawan aiki a cikin yanayin zafi mai zafi da lalata. Tsarin Cantilever Paddle yana ba da damar wafer don dogaro da dogaro yayin aiki, rage haɗarin rarrabuwa da lalacewa.
SiC Cantilever Paddlewani yanki ne na musamman da aka yi amfani da shi a cikin kayan masana'antu na semiconductor kamar tanderun iskar shaka, tanderun watsawa, da tanderun murɗawa, babban amfani shine don ɗaukar wafer da saukewa, tallafi da jigilar wafers yayin aiwatar da yanayin zafi mai zafi.
Tsarin gama garinaSiCcantileverpaddle: tsarin cantilever, gyarawa a ƙarshen ɗaya kuma kyauta a ɗayan, yawanci yana da ƙirar lebur da filafili.
Makamashi na VET yana amfani da kayan aikin silicon carbide mai tsafta don tabbatar da inganci.
| Kaddarorin jiki na Silicon Carbide Recrystallized | |
| Dukiya | Mahimmanci Na Musamman |
| Yanayin aiki (°C) | 1600°C (tare da oxygen), 1700°C (rage yanayi) |
| SiC abun ciki | 99.96% |
| Abin ciki na kyauta | <0.1% |
| Yawan yawa | 2.60-2.70 g/cm3 |
| Bayyanar porosity | <16% |
| Ƙarfin matsi | > 600MPa |
| Ƙarfin lanƙwasa sanyi | 80-90 MPa (20°C) |
| Ƙarfin lanƙwasawa mai zafi | 90-100 MPa (1400°C) |
| Thermal fadada @1500°C | 4.70 10-6/°C |
| Ƙarfin zafin jiki @1200°C | 23W/m•K |
| Na roba modules | 240 GPA |
| Thermal girgiza juriya | Madalla da kyau |
Fa'idodin VET Energy's Advanced SiC Cantilever Paddle for Wafer Processing sune:
-Babban kwanciyar hankali: mai amfani a cikin mahalli sama da 1600 ° C;
-Ƙarancin haɓaka haɓakar haɓakar thermal: yana kula da kwanciyar hankali, rage haɗarin warpage wafer;
-Babban tsarki: ƙananan haɗarin gurɓataccen ƙarfe;
-Inertness sunadarai: lalata-resistant, dace da daban-daban gas yanayi;
-Maɗaukakin ƙarfi da taurin kai: Mai jurewa, tsawon rayuwar sabis;
-Good thermal watsin: taimaka a uniform wafer dumama.
