Advanced SiC Cantilever Paddle don Wafer Processing

Takaitaccen Bayani:

Babban SiC Cantilever Paddle for Wafer Processing wanda vet-china ya ƙaddamar yana amfani da manyan kayan aikin SiC don haɓaka inganci da daidaiton sarrafa wafer. Wurin lantarki na Vet-china yana da kyakkyawan juriya mai zafi da juriya na lalata, yana tabbatar da ingantaccen aikin wafer a cikin mahallin masana'anta, yana mai da shi kyakkyawan zaɓi don haɓaka yawan samarwa.


Cikakken Bayani

Tags samfurin

Na ci gabaSiC Cantilever Paddledon Wafer Processing halitta ta vet-china yana ba da kyakkyawan bayani don masana'antar semiconductor. An yi wannan filafilin cantilever da kayan SiC (silicon carbide), kuma tsananin taurinsa da juriya na zafi yana ba shi damar kula da kyakkyawan aiki a cikin yanayin zafi mai zafi da lalata. Tsarin Cantilever Paddle yana ba da damar wafer don dogaro da dogaro yayin aiki, rage haɗarin rarrabuwa da lalacewa.

SiC Cantilever Paddlewani yanki ne na musamman da aka yi amfani da shi a cikin kayan masana'antu na semiconductor kamar tanderun iskar shaka, tanderun watsawa, da tanderun murɗawa, babban amfani shine don ɗaukar wafer da saukewa, tallafi da jigilar wafers yayin aiwatar da yanayin zafi mai zafi.

Tsarin gama garinaSiCcantileverpaddle: tsarin cantilever, gyarawa a ƙarshen ɗaya kuma kyauta a ɗayan, yawanci yana da ƙirar lebur da filafili.

Makamashi na VET yana amfani da kayan aikin silicon carbide mai tsafta don tabbatar da inganci.

Kaddarorin jiki na Silicon Carbide Recrystallized

Dukiya

Mahimmanci Na Musamman

Yanayin aiki (°C)

1600°C (tare da oxygen), 1700°C (rage yanayi)

SiC abun ciki

> 99.96%

Abin ciki na kyauta

<0.1%

Yawan yawa

2.60-2.70 g/cm3

Bayyanar porosity

<16%

Ƙarfin matsi

> 600MPa

Ƙarfin lanƙwasa sanyi

80-90 MPa (20°C)

Ƙarfin lanƙwasawa mai zafi

90-100 MPa (1400°C)

Thermal fadada @1500°C

4.70 10-6/°C

Ƙarfin zafin jiki @1200°C

23W/m•K

Na roba modules

240 GPA

Thermal girgiza juriya

Madalla da kyau

Fa'idodin VET Energy's Advanced SiC Cantilever Paddle for Wafer Processing sune:

-Babban kwanciyar hankali: mai amfani a cikin mahalli sama da 1600 ° C;

-Ƙarancin haɓaka haɓakar haɓakar thermal: yana kula da kwanciyar hankali, rage haɗarin warpage wafer;

-Babban tsarki: ƙananan haɗarin gurɓataccen ƙarfe;

-Inertness sunadarai: lalata-resistant, dace da daban-daban gas yanayi;

-Ƙarfin ƙarfi da taurin kai: mai jurewa sawa, tsawon rayuwar sabis;

-Good thermal watsin: taimaka a uniform wafer dumama.

Cantilever Paddle10
Cantilever Paddle16
研发团队2
生产设备1
公司客户1

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