Graphite Wafer Boat for Deposition

Short Description:

VET Energy graphite wafer boat is a high-quality consumable tailored for deposition processes in semiconductor, photovoltaic and other industries. Made of high-purity, high-density graphite material, this product has excellent high temperature resistance, corrosion resistance, dimensional stability and other characteristics, and can provide a stable carrier platform for the deposition process to ensure the uniformity and flatness of thin film deposition.

Send email to us Download as PDF

Product Detail

Product Tags

The PECVD graphite boat from VET Energy is manufactured with high-purity isostatic graphite, featuring porosity below 15% and surface roughness Ra≤1.6μm. The superior dimensional stability and thermal conductivity ensure uniform film deposition and enhanced cell efficiency.

Graphite material from SGL:

Typical parameter: R6510
Index	Test standard	Value	Unit
Average grain size	ISO 13320	10	μm
Bulk density	DIN IEC 60413/204	1.83	g/cm³
Open porosity	DIN66133	10	%
Medium pore size	DIN66133	1.8	μm
Permeability	DIN 51935	0.06	cm²/s
Rockwell hardness HR5/100	DIN IEC60413/303	90	HR
Specific electrical resistivity	DIN IEC 60413/402	13	μΩm
Flexural strength	DIN IEC 60413/501	60	MPa
Compressive strength	DIN 51910	130	MPa
Young's modulus	DIN 51915	11.5×10³	MPa
Thermal expansion(20-200℃)	DIN 51909	4.2X10^-6	K^-1
Thermal conductivity (20℃)	DIN 51908	105	Wm^-1K^-1

It is specifically designed for high-efficiency solar cell manufacturing, supporting G12 large-size wafer processing. Optimized carrier design significantly increases throughput, enabling higher yield rates and lower production costs.

Item	Type	Number wafer carrier
PEVCD Grephite boat - The 156 series	156-13 grephite boat	144
	156-19 grephite boat	216
	156-21 grephite boat	240
	156-23 graphite boat	308
PEVCD Grephite boat - The 125 series	125-15 grephite boat	196
	125-19 grephite boat	252
	125-21 grphite boat	280