Graphite Segment Rings with Tantalum Carbide Coating

Short Description:

The popularity of 8-inch silicon carbide (SiC) wafers has made the temperature requirements of semiconductor processes more stringent. However, traditional base materials cannot withstand the test of high temperature environments and are prone to sublimation and damage to the epitaxial process. Fortunately, Semicera’s CvD tantalum carbide (TaC) products provide you with a reliable solution. Our tantalum carbide (TaC) has excellent high temperature resistance, can withstand extreme temperatures up to 2300 degrees Celsius, and provide a longer service life. Contact Semicera today to learn more about our advanced solutions, including customized options for tantalum carbide coated cover plates.


Product Detail

Product Tags

TaC coating is a kind of tantalum carbide (TaC) coating prepared by physical vapor deposition technology, it has the following characteristics:

1. High hardness: TaC coating hardness is high, usually can reach 2500-3000HV, is an excellent hard coating.

2. Wear resistance: TaC coating is very wear-resistant, which can effectively reduce the wear and damage of mechanical parts during use.

3. Good high temperature resistance: TaC coating can also maintain its excellent performance under high temperature environment.

4. Good chemical stability: TaC coating has good chemical stability and can resist many chemical reactions, such as acids and bases.

TaC Coating9
TaC Coating8

碳化钽涂层物理特性物理特性

Physical properties of TaC coating

密度 / Density

14.3 (g/cm³)

比辐射率 / Specific emissivity

0.3

热膨胀系数 / Thermal expansion coefficient

6.3 10-6/K

努氏硬度 / Hardness (HK)

2000 HK

电阻 / Resistance

1×10-5 Ohm*cm

热稳定性 / Thermal stability

<2500℃

石墨尺寸变化 / Graphite size changes

-10~-20um

涂层厚度 / Coating thickness

≥20um typical value (35um±10um)

 

Ningbo VET Energy Technology Co., Ltd is a high-tech enterprise focusing on the production and sales of high-end advanced materials, the materials and technology covering graphite, silicon carbide, ceramics, surface treatment and so on. The products are widely used in photovoltaic, semiconductor, new energy, metallurgy,etc..

Our technical team comes from top domestic research institutions, can provide more professional material solutions for you.

Warmly welcome you to visit our factory, let's have further discussion!

研发团队

生产设备

公司客户

 


  • Previous:
  • Next:

  • WhatsApp Online Chat !