During the vapor phase epitaxy (VPE) process, the role of the pedestal is to support the substrate and ensure uniform heating during the growth process. Different types of pedestals are suitable fo...
Green hydrogen: rapid expansion of global development pipelines and projects
A new report from Aurora energy research highlights how quickly companies are responding to this opportunity and develo...
I. Process parameter exploration
1. TaCl5-C3H6-H2-Ar system
2. Deposition temperature:
According to the thermodynamic formula, it is calculated that when the temperature is greater than 1273K...
Silicon carbide coating technology is a method of forming silicon carbide layer on the surface of materials, usually using chemical vapor deposition, physicochemical vapor deposition, melt impregna...
The third generation of semiconductors, represented by gallium nitride (GaN) and silicon carbide (SiC), have been rapidly developed due to their excellent properties. However, how to accurately mea...