Graphite Boat C/C Carrier For Silicon Wafer PECVD

Graphite boat used in PECVD of solar cell production line

The production of solar cells requires six major processes: texturing, diffusion, etching, coating, screen printing and sintering. In the manufacturing of solar cells, the PECVD tube coating process uses a graphite boat as the working body. The coating process uses plasma enhanced chemical vapor deposition to deposit a silicon nitride film on the front of the silicon wafer to reduce sunlight reflection and the surface of the silicon wafer.

Features of our PECVD graphite boat:
1). Adopted to eliminate the "color lenses " technology , to make sure without "coloe lenses"  during the long-term process.
2). Made of the imported graphite material with high purity ,low impurity content and high strength.
3). Using the 99.9% ceramic for the ceramic assembly with strong corrosion resistant performance and brust proof.
4). Using the precision processing equipment to ensure the accuracy of each parts.

Specification

Ningbo VET Energy Technology Co., Ltd is a high-tech enterprise focusing on the production and sales of high-end advanced materials, the materials and technology including graphite, silicon carbide, ceramics, surface treatment like SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, etc., these products are widely used in photovoltaic, semiconductor, new energy, metallurgy,etc..

Our technical team comes from top domestic research institutions, and have developed multiple patented technologies to ensure product performance and quality, can also provide customers with professional material solutions.