Good quality Silicon Carbide RBSIC/SISIC Cantilever Paddle Used in Solar Photovoltaic Industry

Short Description:

Special advantages of our SiC-coated graphite susceptors include extremely high purity, homogenous coating and an excellent service life. They also have high chemical resistance and thermal stability properties.

We maintain very close tolerances when applying the SiC coating, using high-precision machining to ensure a uniform susceptor profile. We also produce materials with ideal electrical resistance properties for use in inductively heated systems. All finished components come with a purity and dimensional compliance certificate.

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Well-run tools, expert profits crew, and much better after-sales products and services; We’ve been also a unified major spouse and children, every person stick to the company benefit “unification, dedication, tolerance” for Good quality Silicon Carbide RBSIC/SISIC Cantilever Paddle Used in Solar Photovoltaic Industry, We sincerely welcome the two foreign and domestic business enterprise companions, and hope to operate with you in the close to long term!
Well-run tools, expert profits crew, and much better after-sales products and services; We’ve been also a unified major spouse and children, every person stick to the company benefit “unification, dedication, tolerance” for China Refractory ceramic and ceramic kiln, To meet the requirements of particular person customers for each bit more perfect service and stable quality items. We warmly welcome customers around the world to visit us, with our multi-faceted cooperation, and jointly develop new markets, create a brilliant future!

SiC coating/coated of Graphite substrate for Semiconductor

Susceptors hold and heat semiconductor wafers during thermal processing. A susceptor is made of a material which absorbs energy by induction, conduction, and/or radiation and heats the wafer. Its thermal shock resistance, thermal conductivity, and purity are critical to rapid thermal processing (RTP). Silicon carbide coated graphite, silicon carbide (SiC), and silicon (Si) are commonly used for susceptors depending on the specific thermal and chemical environment. PureSiC® CVD SiC and ClearCarbon™ ultra-pure material which delivers superior thermal stability, corrosion resistance, and durability.

Product Description

SiC coating of Graphite substrate for Semiconductor applications produces a part with superior purity and resistance to oxidizing atmosphere.
CVD SiC or CVI SiC is applied to Graphite of simple or complex design parts. Coating can be applied in varying thicknesses and to very large parts.

SiC coating/coated of Graphite substrate for Semiconductor

Technical ceramics are a natural choice for semiconductor thermal processing applications including RTP (Rapid Thermal Processing), Epi (Epitaxial), diffusion, oxidation, and annealing. CoorsTek provides advanced material components specifically designed to withstand thermal shocks with high-purity, sturdy, repeatable performance for high-temperature

Features:
· Excellent Thermal Shock Resistance
· Excellent Physical Shock Resistance
· Excellent Chemical Resistance
· Super High Purity
· Availability in Complex Shape
· Usable under Oxidizing Atmosphere

application：

A wafer needs to pass through several steps before it is ready for use in electronic devices. One important process is silicon epitaxy, in which the wafers are carried on graphite susceptors. The properties and quality of the susceptors have a crucial effect on the quality of the wafer’s epitaxial layer.

Typical Properties of Base Graphite Material:

Apparent Density:	1.85 g/cm3
Electrical Resistivity:	11 μΩm
Flexural Strenth:	49 MPa (500kgf/cm2)
Shore Hardness:	58
Ash:	<5ppm
Thermal Conductivity:	116 W/mK (100 kcal/mhr-℃)