CVD Silicon Carbide Coated Graphite Ring

Short Description:

VET Energy silicon carbide coated graphite ring is a high-performance product designed to provide consistent and reliable performance over an extended period. It has super good heat resistance and thermal uniformity, high purity, erosion resistance, making it the perfect solution for wafer processing applications.

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Typical Properties of Base Graphite Material:

Apparent Density:	1.85 g/cm3
Electrical Resistivity:	11 μΩm
Flexural Strenth:	49 MPa (500kgf/cm2)
Shore Hardness:	58
Ash:	<5ppm
Thermal Conductivity:	116 W/mK (100 kcal/mhr-℃)

We supply various susceptors and graphite components for all current epitaxy reactors. Our products includes barrel susceptors for LPE units, pancake susceptors for LPE, CSD, and Gemini units, and single-wafer susceptors for applied and ASM units.

By combining strong partnerships with leading OEMs, materials expertise and manufacturing know-how, vet offers the optimal design for your application.

VET Energy is the real manufacturer of customized graphite and silicon carbide products with CVD coating, can supply various customized parts for semiconductor and photovoltaic industry. Our technical team comes from top domestic research institutions, can provide more professional material solutions for you.

Features of our products:

1. High temperature oxidation resistance up to 1700℃.
2. High purity and thermal uniformity
3. Excellent corrosion resistance: acid, alkali, salt and organic reagents.
4. High hardness, compact surface, fine particles.
5. Longer service life and more durable

CVD SiC薄膜基本物理性能 Basic physical properties of CVD SiC coating
性质 / Property	典型数值 / Typical Value
晶体结构 / Crystal Structure	FCC β phase 多晶，主要为（111）取向
密度 / Density	3.21 g/cm³
硬度 / Hardness	2500 维氏硬度（500g load）
晶粒大小 / Grain SiZe	2~10μm
纯度 / Chemical Purity	99.99995%
热容 / Heat Capacity	640 J·kg^-1·K^-1
升华温度 / Sublimation Temperature	2700℃
抗弯强度 / Flexural Strength	415 MPa RT 4-point
杨氏模量 / Young' s Modulus	430 Gpa 4pt bend, 1300℃
导热系数 / Thermal Conductivity	300W·m^-1·K^-1
热膨胀系数 / Thermal Expansion(CTE)	4.5×10^-6K^-1