Product features
· Excellent high-temperature performance
PyC coating has features of dense structure, excellent heat resistance, good thermal conductivity, and wear resistance . As both are carbon elements, it has strong adhesion with graphite and can seal residual volatiles inside the graphite to prevent contamination from carbon particles .
· Controllable purity
The purity of PyC coating can reach a level of 5ppm, meeting the purity requirements of high-purity spplications.
· Extended service life and improved product quality
PyC coating can effectively extend the service life of graphite components and improve product quality .thereby effectively reducing cust omer production costs.
·Wide range of applications
PyC coating is mainly used in high-temperature fields such as Si/SiC semiconductor crystal growth, ion implantation, metal smelting for semicondutors, and instruent analysis.
Product Specifications
Typical Performance | Unit | Specification |
Crystal Structure | Hexagonal | |
Alignment | Oriented or non-oriented along 0001 direction | |
Bulk Density | g/cm³ | -2.24 |
Microstructure | Polycrystaline/Mutilayer graphene | |
Hardness | GPa | 1.1 |
Elastic Modulus | GPa | 10 |
Typical Thickness | μm | 30-100 |
Surface Roughness | μm | 1.5 |
Product Purity | ppm | ≤5ppm |