Customized Graphite Heater for Semiconductor Silicon Wafer,SiC coating

Customized Graphite Heater for Semiconductor Silicon Wafer,SiC coating Featured Image

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Technical Specification	VET-M3
Bulk Density (g/cm3)	≥1.85
Ash Content (PPM)	≤500
Shore Hardness	≥45
Specific Resistance (μ.Ω.m)	≤12
Flexural Strength (Mpa)	≥40
Compressive Strength (Mpa)	≥70
Max. Grain Size (μm)	≤43
Coefficient of Thermal Expansion Mm/°C	≤4.4*10-6

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Customized Graphite Heater for Semiconductor Silicon Wafer

Technical Specification	VET-M3
Bulk Density (g/cm3)	≥1.85
Ash Content (PPM)	≤500
Shore Hardness	≥45
Specific Resistance (μ.Ω.m)	≤12
Flexural Strength (Mpa)	≥40
Compressive Strength (Mpa)	≥70
Max. Grain Size (μm)	≤43
Coefficient of Thermal Expansion Mm/°C	≤4.4*10-6

Customized Graphite Heater for Semiconductor Silicon Wafer

Customized Graphite Heater for Semiconductor Silicon Wafer

Customized Graphite Heater for Semiconductor Silicon Wafer

Customized Graphite Heater for Semiconductor Silicon Wafer

Customized Graphite Heater for Semiconductor Silicon Wafer

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Graphite Heater for Semiconductor Silicon Wafer

Semiconductor Silicon Wafer

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