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Odolný vůči vysokým teplotám (CFC uhlíkové vlákno)...
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Susceptor plátku s povlakem karbidu tantalu
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Vodící kroužky povlaku karbidu tantalu
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Povlakový kroužek z karbidu tantalu
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Vodicí kroužek povlaku TaC
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12palcový SOI plátek
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8palcový silikonový plátek typu P
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4palcový GaAs plátek
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Monokrystalický 8palcový silikonový plátek
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