Barrel susceptor for liquid phase epitaxy LPE
EPI (Epitaxy) is a critical process in the manufacturing of advanced semiconductors. It involves the deposition of thin layers of material on a substrate to create complex device structures. SiC coated graphite barrel susceptor for EPI are commonly used as susceptors in EPI reactors due to their excellent thermal conductivity and resistance to high temperatures. With CVD-SiC coating, it becomes more resistant to contamination, erosion, and thermal shock. This results in a longer lifespan for the susceptor and improved film quality.
Advantages of our barrel susceptor for liquid phase epitaxy LPE:
Reduced Contamination: SiC's inert nature prevents impurities from adhering to the susceptor surface, reducing the risk of contamination of the deposited films.
Increased Erosion Resistance: SiC is significantly more resistant to erosion than conventional graphite, leading to a longer lifespan for the susceptor.
Improved Thermal Stability: SiC has excellent thermal conductivity and can withstand high temperatures without significant distortion.
Enhanced Film Quality: The improved thermal stability and reduced contamination result in higher-quality deposited films with improved uniformity and thickness control.
Ningbo VET Energy Technology Co., Ltd is a high-tech enterprise focusing on the production and sales of high-end advanced materials, the materials and technology including graphite, silicon carbide, ceramics, surface treatment like SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, etc., these products are widely used in photovoltaic, semiconductor, new energy, metallurgy,etc..
Our technical team comes from top domestic research institutions, and have developed multiple patented technologies to ensure product performance and quality, can also provide customers with professional material solutions.
We warmly welcome you to visit our laboratory and plant for technical discussion and cooperations!
