SiC coated graphite bases are commonly used to support and heat single crystal substrates in metal-organic chemical vapor deposition (MOCVD) equipment. The thermal stability, thermal uniformity and...
Seals play a key role in the industrial field, and graphite bearings, as an important seal, are gradually showing broad application prospects. Especially in fields such as semiconductor manufacturi...
Triangular defect
Triangular defects are the most fatal morphological defects in SiC epitaxial layers. A large number of literature reports have shown that the formation of triangular defects is...
Silicon carbide crystal boat is a new type of aviation equipment, it is made of silicon carbide and other synthetic materials, with strong heat resistance and cold resistance. The main characterist...
Sintered silicon carbide is an important ceramic material, which is widely used in high temperature, high pressure and high strength fields. Reaction sintering of sic is a key step in preparing sin...