I. Process parameter exploration
1. TaCl5-C3H6-H2-Ar system
2. Deposition temperature:
According to the thermodynamic formula, it is calculated that when the temperature is greater than 1273K...
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A lithium battery is a type of battery using a lithium metal or a lithium alloy as a negative electrode material and a nonaqueous electrolyte solution. Lithium batteries are mainly used in digital ...
Graphite crucible is a special laboratory tool made of graphite material. Mainly used in high temperature smelting, chemical reaction, material heat treatment and other experimental processes.
Grap...
Early wet etching promoted the development of cleaning or ashing processes. Today, dry etching using plasma has become the mainstream etching process. Plasma consists of electrons, cations and radi...