Ingxenye yokuqala yengxenye -Izingxenye zemishini ye-SiC epitaxial

Incazelo emfushane:

Izingxenye ze-graphite ezihlanganiswe ne-SiC zemishini ye-SiC epitaxial evela ku-LPE Italy

Isingeniso kanye nokusetshenziswa komkhiqizo:Igumbi le-SiC epitaxial reaction reaction kwezinye izingxenye zemoto, izinga lokushisa elilawulwayo

Indawo yedivayisi yomkhiqizo: ekamelweni lokusabela, hhayi ukuthintana ngokuqondile ne-wafer

Imikhiqizo esezingeni eliphansi: amadivayisi kagesi

Imakethe yetheminali enkulu: izimoto zamandla amasha