I-Dual-Damascene iwubuchwepheshe benqubo esetshenziselwa ukwakha izixhumi zensimbi kumasekethe ahlanganisiwe. Kuyintuthuko eyengeziwe yenqubo yaseDamaseku. Ngokwenza ngokusebenzisa izimbobo nama-grooves ngesikhathi esifanayo esinyathelweni esifanayo senqubo futhi ugcwalise ngensimbi, ukukhiqizwa okudidiyelwe kokuxhuma kwensimbi kuyabonakala.
Kungani ibizwa ngokuthi iDamaseku?
Idolobha laseDamaseku liyinhloko-dolobha yaseSiriya, futhi izinkemba zaseDamaseku zidume ngokuba bukhali nokubukeka kwazo okuhle. Kudingeka uhlobo lwenqubo yokufakela: okokuqala, iphethini edingekayo iqoshwe ebusweni bensimbi yaseDamaseku, futhi izinto ezilungiselelwe kusengaphambili zifakwe ngokuqinile emifantwini eqoshiwe. Ngemva kokuba inlay isiqediwe, indawo engaphezulu ingase ingalingani. Ingcweti izoyipholisha ngokucophelela ukuze iqinisekise ukushelela kwayo yonke. Futhi le nqubo iyisibonelo senqubo yeDamaseku ekabili ye-chip. Okokuqala, ama-grooves noma izimbobo ziqoshwe kungqimba lwe-dielectric, bese insimbi igcwaliswa kuzo. Ngemuva kokugcwalisa, insimbi eyengeziwe izosuswa nge-cmp.
Izinyathelo eziyinhloko zenqubo ye-damascene ekabili zifaka:
▪ Ukubekwa kwe-dielectric layer:
Idiphozithi isendlalelo se-dielectric material, njenge-silicon dioxide (SiO2), ku-semiconductorisilucwecwana.
▪ I-Photolithography ukuchaza iphethini:
Sebenzisa i-photolithography ukuze uchaze iphethini ye-vias nemisele kungqimba lwe-dielectric.
▪Etching:
Dlulisela iphethini ye-vias kanye nemisele kungqimba lwe-dielectric ngokusebenzisa inqubo yokunamathisela eyomile noma emanzi.
▪ Ukufakwa kwensimbi:
Idiphozithi yensimbi, njengethusi (Cu) noma i-aluminium (Al), nge-vias kanye nemisele ukuze yakhe izixhumi zensimbi.
▪ Ukupholisha ngomshini ngamakhemikhali:
Ukupholisha ngekhemikhali komshini kwendawo yensimbi ukususa insimbi eyeqile futhi kucaba indawo engaphezulu.
Uma kuqhathaniswa nenqubo yokukhiqiza ye-metal interconnect yendabuko, inqubo ye-damascene ekabili inezinzuzo ezilandelayo:
▪Izinyathelo zenqubo eyenziwe lula:ngokwakha i-vias kanye nemisele kanyekanye esinyathelweni esifanayo senqubo, izinyathelo zenqubo kanye nesikhathi sokukhiqiza siyancishiswa.
▪Ukwenziwa ngcono kokukhiqiza:ngenxa yokwehliswa kwezinyathelo zenqubo, inqubo ye-damascene emibili ingathuthukisa ukusebenza kahle kokukhiqiza futhi inciphise izindleko zokukhiqiza.
▪Thuthukisa ukusebenza kwezixhumi zensimbi:inqubo ye-damascene ekabili ingafinyelela ukuxhumana kwensimbi emincane, ngaleyo ndlela ithuthukise ukuhlanganiswa nokusebenza kwamasekhethi.
▪Yehlisa amandla e-parasitic kanye nokumelana:ngokusebenzisa izinto eziphansi-k ze-dielectric kanye nokwandisa ukwakheka kwe-metal interconnects, amandla e-parasitic nokumelana kungancishiswa, ukuthuthukisa isivinini kanye nokusebenza kokusetshenziswa kwamandla kwamasekethe.
Isikhathi sokuthumela: Nov-25-2024