I-crystal furnace eyodwa iyithuluzi elisebenzisa i-graphite heaterukuncibilikisa izinto ze-silicon ze-polycrystalline endaweni yegesi engasebenzi (i-argon) futhi isebenzisa indlela ye-Czochralski ukuze kukhule amakristalu angawodwa angagudluki. Ikakhulukazi yakhiwe ngamasistimu alandelayo:
Isistimu yokudlulisela ngomshini
Uhlelo lokudlulisa ngomshini luwuhlelo oluyisisekelo lokusebenza lwesithando somlilo sekristalu esisodwa, esibhekene kakhulu nokulawula ukunyakaza kwamakristalu kanyeiziphambano, okuhlanganisa ukuphakanyiswa nokujikeleza kwamakristalu embewu kanye nokuphakanyiswa nokuzungezisaiziphambano. Ingakwazi ukulungisa ngokunembile amapharamitha njengesikhundla, isivinini kanye ne-angle yokujikeleza yamakristalu nama-crucibles ukuze kuqinisekiswe inqubekelaphambili eshelelayo yenqubo yokukhula kwekristalu. Isibonelo, ezigabeni ezihlukene zokukhula kwe-crystal ezifana nokuhlwanyela, ukugoba, ukubopha amahlombe, ukukhula kobubanzi obulinganayo nomsila, ukunyakaza kwamakristalu embewu kanye ne-crucibles kudinga ukulawulwa ngokunembile yilesi simiso ukuze kuhlangatshezwane nezidingo zenqubo yokukhula kwe-crystal.
Isistimu yokulawula izinga lokushisa lokushisa
Lena enye yezinhlelo eziyinhloko zesithando somlilo sekristalu esisodwa, esisetshenziselwa ukukhiqiza ukushisa nokulawula ngokunembile izinga lokushisa esithandweni somlilo. Ngokuyinhloko yakhiwe izingxenye ezifana nezifudumezi, izinzwa zokushisa, nezilawuli zokushisa. I-heater ngokuvamile yenziwe ngezinto ezifana ne-high-purity graphite. Ngemuva kokuthi i-alternating current ishintshiwe futhi incishiswe ukuze ikhulise amandla amanje, i-heater ikhiqiza ukushisa ukuze incibilike izinto ze-polycrystalline ezifana ne-polysilicon ku-crucible. Inzwa yezinga lokushisa iqapha ukushintsha kwezinga lokushisa esithandweni ngesikhathi sangempela futhi idlulisele isignali yezinga lokushisa kusilawuli sezinga lokushisa. Isilawuli sokushisa silawula ngokunembile amandla okushisa ngokuvumelana nemingcele yokushisa ebekiwe kanye nesignali yokushisa kwempendulo, ngaleyo ndlela igcine ukuzinza kwezinga lokushisa esithandweni somlilo futhi inikeze indawo yokushisa efanelekile yokukhula kwekristalu.
Isistimu ye-vacuum
Umsebenzi oyinhloko wesistimu ye-vacuum ukudala nokugcina imvelo ye-vacuum esithandweni ngesikhathi senqubo yokukhula kwekristalu. Amagesi omoya nokungcola esithandweni akhishwa ngamaphampu evacuum nezinye izinto zokusebenza ukwenza umfutho wegesi esithandweni ufinyelele ezingeni eliphansi kakhulu, ngokuvamile elingaphansi kuka-5TOR (torr). Lokhu kungavimbela impahla ye-silicon ukuthi ifakwe i-oxidized emazingeni okushisa aphezulu futhi iqinisekise ubumsulwa kanye nekhwalithi yokukhula kwekristalu. Ngasikhathi sinye, imvelo ye-vacuum nayo isiza ukususa ukungcola okuguquguqukayo okukhiqizwa phakathi nenqubo yokukhula kwekristalu nokuthuthukisa ikhwalithi yekristalu.
Isistimu ye-Argon
Uhlelo lwe-argon ludlala indima ekuvikeleni nasekulawuleni ukucindezela esithandweni esithandweni somlilo sekristalu esisodwa. Ngemva kokuhlanza, igesi ye-argon ehlanzekile kakhulu (ukuhlanzeka kufanele kube ngaphezu kuka-6 9) igcwaliswa esithandweni. Ngakolunye uhlangothi, ingavimbela umoya wangaphandle ukuthi ungangeni esithandweni futhi ivimbele izinto ze-silicon ukuthi zifakwe i-oxidized; ngakolunye uhlangothi, ukugcwaliswa kwegesi ye-argon kungagcina ukucindezela esitebeleni somlilo futhi kunikeze indawo yokucindezela efanelekile yokukhula kwekristalu. Ngaphezu kwalokho, ukugeleza kwegesi ye-argon nakho kungathatha ukushisa okukhiqizwa phakathi nenqubo yokukhula kwekristalu, kudlala indima ethile yokupholisa.
Uhlelo lokupholisa amanzi
Umsebenzi wesistimu yokupholisa amanzi ukupholisa izingxenye ezihlukahlukene zokushisa okuphezulu kwesithando somlilo sekristalu esisodwa ukuze kuqinisekiswe ukusebenza okuvamile nokuphila kwesevisi yemishini. Ngesikhathi sokusebenza kwesithando somlilo sekristalu esisodwa, i-heater,crucible, i-electrode nezinye izakhi zizokhiqiza ukushisa okukhulu. Uma zingapholiswanga ngesikhathi, okokusebenza kuzoshisa kakhulu, konakale noma konakale. Isistimu yokupholisa amanzi isusa ukushisa kwalezi zingxenye ngokuzungeza amanzi apholisayo ukuze kugcinwe izinga lokushisa lempahla endaweni ephephile. Ngesikhathi esifanayo, uhlelo lokupholisa amanzi lungasiza futhi ekulungiseni izinga lokushisa esithandweni ukuthuthukisa ukunemba kokulawula izinga lokushisa.
Uhlelo lokulawula ugesi
Uhlelo lokulawula ugesi "luyingqondo" yesithando somlilo esisodwa se-crystal, esibhekene nokuqapha nokulawula ukusebenza kwayo yonke imishini. Ingathola amasiginali avela kuzinzwa ezihlukahlukene, njengezinzwa zokushisa, izinzwa zokucindezela, izinzwa zendawo, njll., futhi iqondise futhi ilawule uhlelo lokudlulisela ngomshini, uhlelo lokulawula izinga lokushisa lokushisa, uhlelo lwe-vacuum, uhlelo lwe-argon kanye nohlelo lokupholisa amanzi olusekelwe kulezi zimpawu. Isibonelo, ngesikhathi senqubo yokukhula kwe-crystal, uhlelo lokulawula ugesi lungakwazi ukulungisa ngokuzenzakalelayo amandla okushisa ngokusho kwesignali yokushisa ehlinzekwa yinzwa yokushisa; ngokusho kokukhula kwekristalu, ingakwazi ukulawula isivinini sokunyakaza kanye ne-rotation angle ye-crystal imbewu kanye ne-crucible. Ngesikhathi esifanayo, uhlelo lokulawula ugesi lubuye lube nokuxilongwa kwephutha kanye nemisebenzi ye-alamu, engakwazi ukubona izimo ezingavamile zemishini ngesikhathi futhi iqinisekise ukusebenza okuphephile kwemishini.
Isikhathi sokuthumela: Sep-23-2024