Ukwembula Izimpawu Ezibalulekile Zezikebhe Ze-Graphite Ekukhiqizeni I-Semiconductor Ceramics

Izikebhe zeGraphite, ezaziwa nangokuthi izikebhe ze-graphite, zidlala indima ebalulekile ezinqubweni eziyinkimbinkimbi zokwenziwa kwe-semiconductor ceramics. Le mikhumbi ekhethekile isebenza njengabathwali abathembekile be-wafers ye-semiconductor ngesikhathi sokwelashwa okushisa kakhulu, iqinisekisa ukucubungula okunembile nokulawulwayo. Ngezimpawu zabo ezihlukile kanye nezinhlelo zokusebenza eziguquguqukayo,Izikebhe ze-graphitesebengamathuluzi abalulekile embonini ye-semiconductor. Ake sihlole izici ezibalulekile ezenzaIzikebhe ze-graphiteizingxenye ezibalulekile ekwenziweni kwe-semiconductor ceramics.

1. Ukubekezelela izinga lokushisa eliphezulu:

Izikebhe ze-graphiteenziwe ngezinto ezisezingeni eliphezulu zegraphite ezaziwa ngokumelana nokushisa okukhethekile. Lesi sibaluli sivumela izikebhe ze-Graphite ukuthi zimelane namazinga okushisa adlulele okuhlangatshezwana nawo ngesikhathi sezinqubo zokwenziwa kwe-semiconductor, njenge-chemical vapor deposition (CVD) kanye ne-silicon carbide coating. Amandla okugcina ubuqotho besakhiwo nokuzinza kobukhulu ngaphansi kwezimo zokushisa eziqinile kubalulekile ukuze kuqinisekiswe ukukhiqizwa okungaguquki nokuthembekile kwe-semiconductor.

2. Ukungangeni Kwamakhemikhali:

I-graphite, into yokuqala esetshenziswa kuIzikebhe ze-graphite, ibonisa ukungabi namakhemikhali okuphawulekayo, okuyenza imelane nokugqwala nokusabela kwamakhemikhali. Lesi sici sizuzisa kakhulu ekukhiqizeni izitsha zobumba ze-semiconductor, lapho kuvame ukusetshenziswa amakhemikhali anonya namagesi asebenzayo. Izikebhe ze-graphite zihlinzeka ngendawo yokuvikela yama-wafers we-semiconductor, ukuvimbela ukungcoliswa nokuqinisekisa ukuhlanzeka komkhiqizo wokugcina.

3. Ukulawula Ubukhulu obunembile:

Izikebhe ze-graphiteakhiwe ngokunemba ukuze athwale amawafa e-semiconductor anosayizi abahlukahlukene kanye nokuma. Imiklamo yabo eyenziwe ngokwezifiso ivumela ukulawula okunembayo kwe-dimensional, iqinisekisa ukulingana okuqinile kwama-wafers kanye nokunciphisa ubungozi bokulimala ngesikhathi sokuphatha nokucubungula. Leli zinga lokunemba libalulekile ukuze kuzuzwe ukujiya kokunamathela okufanayo kanye nokunemba kokubekwa ezinqubweni zokukhiqiza ama-semiconductor.

4. Ukuhlukahluka Kwezinhlelo Zokusebenza:

Izikebhe ze-graphitethola ukusetshenziswa okusabalele ezinqubweni ezihlukahlukene zokwenziwa kwe-semiconductor, okuhlanganisa i-epitaxy, i-diffusion, i-annealing, kanye ne-deposition yefilimu encane. Kungakhathaliseki ukuthi isekela ama-silicon wafers ngesikhathi sokucubungula okushisayo noma ikhuthaza ukukhula kwezingqimba ze-epitaxial, izikebhe ze-Graphite zinikeza ukuguquguquka nokuthembeka kuzo zonke izinhlelo zokusebenza ezihlukahlukene. Amandla abo okumelana nokuchayeka isikhathi eside emazingeni okushisa aphezulu kanye nezindawo ezonakalisayo kubenza babe amathuluzi abalulekile ekukhiqizeni izitsha zobumba ze-semiconductor.

5. Ukuhambisana Kwe-Silicon Carbide Coating:

Izikebhe ze-graphite zifaneleka kahle ekusetshenzisweni okubandakanya i-silicon carbide (SiC), ingxenye ebalulekile kumadivayisi athuthukisiwe we-semiconductor. Ukuhambisana kwegraphite ne-silicon carbide kwenza ukufakwa okusebenzayo nokufanayo kwezendlalelo ze-SiC kuma-semiconductor substrates, kuthuthukise ukusebenza kwedivayisi nokuthembeka. Izikebhe ze-graphite zidlala indima ebalulekile ekusizeni inqubo yokufaka, iqinisekise ukumbozwa okufanayo kanye nokulawula okunembile phezu kogqinsi bokunamathela.

Sengiphetha, izikebhe ze-Graphite zisebenza njengezingxenye ezibalulekile ekwenziweni kwe-semiconductor ceramics, enikeza inhlanganisela eyingqayizivele yokubekezelela izinga lokushisa eliphezulu, ukungabi namakhemikhali kwamakhemikhali, ukulawulwa okunembile kobukhulu, kanye nokuhambisana nezingubo ze-silicon carbide. Ukuguquguquka kwazo kanye nokuthembeka kwazo kuzenza zibe amathuluzi abaluleke kakhulu ezinqubo zokwenziwa kwe-semiconductor, okuvumela ukukhiqizwa kwamadivayisi we-semiconductor wekhwalithi ephezulu nokusebenza okuphezulu. Njengoba ubuchwepheshe be-semiconductor buqhubeka nokuthuthuka, izikebhe ze-Graphite zizohlala ziyimpahla ebaluleke kakhulu, ziqhuba ukusungulwa kanye nenqubekela phambili embonini ye-semiconductor.