Isimo socwaningo se-silicon carbide ceramics eyenziwe kabusha

Kwenziwe kabushai-silicon carbide (RSiC) izitsha zobumbakukhona aukusebenza okuphezulu kwe-ceramic impahla. Ngenxa yokumelana kwayo okuhle kakhulu nokushisa okuphezulu, ukumelana ne-oxidation, ukumelana nokugqwala nobulukhuni obukhulu, isetshenziswe kabanzi emikhakheni eminingi, njengokukhiqiza i-semiconductor, imboni ye-photovoltaic, iziko lokushisa eliphezulu kanye nemishini yamakhemikhali. Ngokukhula kwesidingo sezinto ezisebenza kahle embonini yesimanje, ucwaningo nokuthuthukiswa kwezitsha zobumba ezenziwe kabusha ze-silicon carbide ziyajula.

1. Ukulungiselela ubuchwepheshe bei-silicon carbide ceramics eyenziwe kabusha

Ukulungiselela ubuchwepheshe of recrystallizedi-silicon carbide ceramicsikakhulukazi kuhlanganisa izindlela ezimbili: powder sintering kanye vapor deposition (CVD). Phakathi kwazo, indlela ye-powder sintering iwukuba i-sinter silicon carbide powder ngaphansi kwemvelo yokushisa ephezulu ukuze izinhlayiya ze-silicon carbide zakhe isakhiwo esiminyene ngokusakazwa nokuphinda kuhlanganiswe phakathi kwezinhlamvu. Indlela yokubeka umhwamuko ukufaka i-silicon carbide ebusweni be-substrate ngokusebenzisa ukusabela komhwamuko wamakhemikhali ezingeni lokushisa eliphezulu, ngaleyo ndlela yakhe ifilimu ye-silicon carbide ehlanzekile kakhulu noma izingxenye zesakhiwo. Lobu buchwepheshe bubili bunezinzuzo zabo. Indlela ye-powder sintering ifaneleka ekukhiqizeni ngezinga elikhulu futhi inezindleko eziphansi, kuyilapho indlela yokubeka umhwamuko inganikeza ukuhlanzeka okuphezulu nesakhiwo esiminyene, futhi isetshenziswa kabanzi emkhakheni we-semiconductor.

2. Izinto ezibonakalayo zei-silicon carbide ceramics eyenziwe kabusha

Isici esivelele se-recrystallized silicon carbide ceramics ukusebenza kwayo okuhle kakhulu ezindaweni zokushisa okuphezulu. Iphuzu lokuncibilika lale nto lifinyelela ku-2700°C, futhi linamandla amahle emishini emazingeni okushisa aphezulu. Ngaphezu kwalokho, i-silicon carbide eyenziwe kabusha futhi inokumelana ne-oxidation okuhle kakhulu nokumelana nokugqwala, futhi ingahlala izinzile ezindaweni zamakhemikhali ezeqisayo. Ngakho-ke, ama-ceramics e-RSiC asetshenziswe kabanzi emkhakheni weziko lokushisa eliphezulu, izinto eziphikisayo ezishisa kakhulu, kanye nemishini yamakhemikhali.

Ngaphezu kwalokho, i-silicon carbide eyenziwe kabusha ine-conductivity ephezulu yokushisa futhi ingakwazi ukuqhuba ukushisa ngokuphumelelayo, okuyenza ibe nenani elibalulekile lesiceloAma-reactors e-MOCVDkanye nemishini yokwelapha ukushisa ekukhiqizeni i-semiconductor wafer. I-conductivity yayo ephezulu yokushisa kanye nokumelana nokushisa okushisayo kuqinisekisa ukusebenza okuthembekile kwemishini ngaphansi kwezimo ezimbi kakhulu.

3. Izinkambu zokufaka izicelo zamaceramics e-silicon carbide enziwe kabusha

Ukukhiqizwa kwe-semiconductor: Embonini ye-semiconductor, izitsha zobumba ezenziwe kabusha ze-silicon carbide zisetshenziselwa ukwakha ama-substrates nezisekelo kuma-reactors e-MOCVD. Ngenxa yokumelana kwayo nezinga lokushisa eliphezulu, ukumelana nokugqwala, kanye nokushisa okuphezulu kwe-thermal, izinto ze-RSiC zingagcina ukusebenza okuzinzile ezindaweni eziyinkimbinkimbi zokusabela kwamakhemikhali, ziqinisekise ikhwalithi kanye nesivuno samawafa we-semiconductor.

Imboni ye-Photovoltaic: Embonini ye-photovoltaic, i-RSiC isetshenziselwa ukwakha isakhiwo sokusekela semishini yokukhula kwe-crystal. Njengoba ukukhula kwekristalu kudinga ukwenziwa ekushiseni okuphezulu ngesikhathi sokukhiqiza amaseli e-photovoltaic, ukumelana nokushisa kwe-silicon carbide evuselelwe kabusha kuqinisekisa ukusebenza okuzinzile kwesikhathi eside kwemishini.

Izithando zokushisa eziphezulu: I-ceramics ye-RSiC nayo isetshenziswa kabanzi ezithandweni ezinokushisa okuphezulu, njengama-linings kanye nezingxenye ze-vacuum furnaces, izithando zomlilo ezincibilikayo nezinye izinto zokusebenza. Ukumelana nokushaqeka kwayo okushisayo kanye nokumelana ne-oxidation kuyenza ibe enye yezinto ezingenakushintshwa ezimbonini ezisezingeni eliphezulu.

4. Isiqondiso socwaningo lwe-silicon carbide ceramics eyenziwe kabusha

Ngokukhula kwesidingo sezinto ezisebenza kahle kakhulu, isiqondiso socwaningo se-silicon carbide ceramics enziwe kabusha sesicace kancane kancane. Ucwaningo lwangomuso luzogxila kulezi zici ezilandelayo:

Ukuthuthukisa ubumsulwa bezinto ezibonakalayo: Ukuze kuhlangatshezwane nezidingo eziphakeme zokuhlanzeka emkhakheni we-semiconductor kanye ne-photovoltaic, abacwaningi bahlola izindlela zokuthuthukisa ubumsulwa be-RSiC ngokuthuthukisa ubuchwepheshe bokufakwa komhwamuko noma ukwethula izinto ezintsha zokusetshenziswa, ngaleyo ndlela bathuthukise inani layo lokusetshenziswa kulezi zindawo zobuchwepheshe obuphezulu. .

Ukuthuthukisa i-microstructure: Ngokulawula izimo ze-sintering kanye nokusatshalaliswa kwezinhlayiya ze-powder, i-microstructure ye-silicon carbide eyenziwe kabusha ingathuthukiswa, ngaleyo ndlela ithuthukise izakhiwo zayo zemishini kanye nokumelana nokushaqeka okushisayo.

Izinto ezisebenzayo eziyinhlanganisela: Ukuze uvumelane nezimo ezisetshenziswayo eziyinkimbinkimbi, abacwaningi bazama ukuhlanganisa i-RSiC nezinye izinto zokwakha izinto eziyinhlanganisela ezinezakhiwo ezisebenza ngezinto eziningi, njengezinto eziyinhlanganisela ezenziwe kabusha ze-silicon carbide ezinokumelana nokugqokwa okuphezulu kanye nokuhanjiswa kukagesi.

5. Isiphetho

Njengempahla esebenza kahle kakhulu, ama-ceramics e-silicon carbide enziwe kabusha asetshenziswe kabanzi emikhakheni eminingi ngenxa yezakhiwo zawo ezinhle kakhulu ekushiseni okuphezulu, ukumelana ne-oxidation kanye nokumelana nokugqwala. Ucwaningo lwesikhathi esizayo luzogxila ekuthuthukiseni ubumsulwa bezinto ezibonakalayo, ukwenza ngcono i-microstructure kanye nokuthuthukisa izinto ezisebenzayo eziyinhlanganisela ukuze kuhlangatshezwane nezidingo ezikhulayo zezimboni. Ngalezi zinto ezintsha zobuchwepheshe, izitsha zobumba ezenziwe kabusha ze-silicon carbide kulindeleke ukuthi zibambe iqhaza elikhulu emikhakheni yobuchwepheshe obuphezulu.