Izinto ezibalulekile ezinquma ikhwalithi yokukhula kwe-silicon ye-monocrystalline - insimu eshisayo

Inqubo yokukhula ye-silicon ye-monocrystalline yenziwa ngokuphelele emkhakheni oshisayo. Inkambu eshisayo eshisayo isiza ekuthuthukiseni ikhwalithi yamakristalu futhi inokusebenza kahle okuphezulu kwekristalu. Idizayini yenkambu eshisayo inquma kakhulu izinguquko kumazinga okushisa endaweni yokushisa eguquguqukayo kanye nokugeleza kwegesi egumbini lomlilo. Umehluko ezintweni ezisetshenziswa emkhakheni oshisayo unquma ngokuqondile impilo yesevisi yensimu yokushisa. Insimu yokushisa engenangqondo ayinzima nje kuphela ukukhulisa amakristalu ahlangabezana nezidingo zekhwalithi, kodwa futhi ayikwazi ukukhula i-monocrystalline ephelele ngaphansi kwezidingo ezithile zenqubo. Yingakho imboni ye-silicon ye-monocrystalline edonsa ngokuqondile ibheka ukuklanywa kwensimu eshisayo njengobuchwepheshe obuyinhloko futhi itshala amandla amakhulu kanye nezinsiza ezibonakalayo ocwaningweni nasekuthuthukisweni kwenkundla eshisayo.

Isistimu ye-thermal yakhiwe ngezinto ezihlukahlukene zensimu yokushisa. Sethula kuphela kafushane izinto ezisetshenziswa emkhakheni oshisayo. Ngokuqondene nokusatshalaliswa kwezinga lokushisa emkhakheni oshisayo kanye nomthelela wawo ekudonseni ikristalu, ngeke sikuhlaziye lapha. I-thermal field material ibhekisela esakhiweni kanye nengxenye yokushisa okushisayo egumbini lesithando somlilo sokukhula kwekristalu, okubalulekile ekudaleni ukusatshalaliswa kwezinga lokushisa okufanelekile eduze kwe-semiconductor yokuncibilika kanye nekristalu.

 

1. Impahla yesakhiwo sensimu eshisayo

Izinto eziyisisekelo ezisekelayo zendlela yokudonsa ngokuqondile ukuze kukhule i-silicon ye-monocrystalline i-high-purity graphite. Izinto ze-graphite zidlala indima ebaluleke kakhulu embonini yesimanje. Zingasetshenziswa njengezingxenye zesakhiwo senkundla yokushisa njengeizifudumezi, amashubhu omhlahlandlela, iziphambano, amashubhu okufakelwa, amathreyi e-crucible, njll ekulungiseleleni i-silicon ye-monocrystalline ngendlela ye-Czochralski.

Izinto ze-graphitezikhethwa ngoba kulula ukuzilungiselela ngamanani amakhulu, zingacutshungulwa futhi zimelana nokushisa okuphezulu. Ikhabhoni esesimweni sedayimane noma igraphite inephuzu lokuncibilika eliphakeme kunanoma iyiphi i-elementi noma inhlanganisela. Izinto ze-graphite ziqinile impela, ikakhulukazi emazingeni okushisa aphezulu, futhi ukuhanjiswa kwawo kagesi nokushisayo nakho kuhle kakhulu. I-conductivity yayo kagesi iyenza ifaneleke njenge-aihithaimpahla. Ine-coefficient ye-thermal conductivity eyanelisayo, evumela ukushisa okukhiqizwa yi-heater ukuthi kusatshalaliswe ngokulinganayo ku-crucible nezinye izingxenye zensimu yokushisa. Kodwa-ke, emazingeni okushisa aphezulu, ikakhulukazi emabangeni amade, imodi yokudlulisa ukushisa eyinhloko imisebe.

Izingxenye ze-graphite ekuqaleni zenziwe ngezinhlayiya ezinhle ze-carbonaceous ezixutshwe ne-binder futhi zakhiwe ngokucindezela i-extrusion noma i-isostatic. Izingxenye ze-graphite ezisezingeni eliphezulu zivame ukucindezelwa ngokwe-isostatically. Lonke ucezu kuqala lufakwe i-carbonized bese lufakwa i-graphitized emazingeni okushisa aphezulu kakhulu, asondele ku-3000°C. Izingxenye ezicutshungulwa kuzo zonke lezi zicucu ngokuvamile zihlanzwa endaweni ene-chlorine emazingeni okushisa aphezulu ukuze kususwe ukungcoliswa kwensimbi ukuze kuhlangatshezwane nezidingo zemboni ye-semiconductor. Kodwa-ke, ngisho nangemva kokuhlanzwa okufanele, izinga lokungcoliswa kwensimbi liyimiyalo eminingana yobukhulu obuphakeme kunaleyo evunyelwe izinto ze-silicon monocrystalline. Ngakho-ke, ukunakekelwa kufanele kuthathwe ekwakhiweni kwensimu eshisayo ukuze kuvinjelwe ukungcoliswa kwalezi zingxenye ekungeneni endaweni encibilikayo noma ekristalu.

Izinto ze-graphite zikwazi ukungena kancane, okwenza kube lula ukuthi insimbi esele ngaphakathi ifinyelele phezulu. Ngaphezu kwalokho, i-silicon monoxide ekhona kugesi yokuhlanza ezungeze indawo yegraphite ingangena ezintweni eziningi futhi isabele.

Izifudumezi zokuqala ze-monocrystalline silicon zomlilo zenziwe ngezinsimbi eziphikisayo ezifana ne-tungsten ne-molybdenum. Ngokukhula okwandayo kobuchwepheshe bokucubungula i-graphite, izakhiwo zikagesi zokuxhuma phakathi kwezingxenye ze-graphite sezizinzile, futhi izifudumezi zesithando se-monocrystalline silicon sezithathele indawo ngokuphelele i-tungsten, i-molybdenum nezinye izifudumezi ezibonakalayo. Njengamanje, izinto ezisetshenziswa kakhulu zegraphite yi-isostatic graphite. Ubuchwepheshe bezwe lami bokulungiselela i-graphite ye-isostatic busemuva ngokuqhathaniswa, futhi izinto eziningi ze-graphite ezisetshenziswa embonini yasekhaya ye-photovoltaic zingeniswa zivela phesheya. Abakhiqizi bangaphandle be-graphite ye-isostatic ikakhulukazi bahlanganisa i-SGL yaseJalimane, i-Tokai Carbon yase-Japan, i-Toyo Tanso yase-Japan, njll. E-Czochralski monocrystalline silicon furnaces, ngezinye izikhathi kusetshenziswa izinto eziyinhlanganisela ye-C/C, futhi seziqalile ukusetshenziselwa ukwakha amabhawodi, amantongomane, izikhilimu, izinsimbi. amapuleti nezinye izingxenye. Izinhlanganisela zekhabhoni/ikhabhoni (C/C) ziyizinhlanganisela ze-carbon fibre eziqiniswe ngekhabhoni ezinochungechunge lwezakhiwo ezinhle kakhulu njengamandla athile aphezulu, i-modulus ethize ephezulu, i-coefficient ephansi yokwanda okushisayo, ukuhamba kahle kukagesi, ukuqina kokuphuka okuphezulu, amandla adonsela phansi athile aphansi, ukumelana nokushaqeka okushisayo, ukumelana nokugqwala, nokumelana nezinga lokushisa eliphezulu. Njengamanje, asetshenziswa kakhulu ku-aerospace, umjaho, i-biomaterials neminye imikhakha njengezinto ezintsha zesakhiwo ezimelana nezinga lokushisa eliphezulu. Njengamanje, izingqinamba ezinkulu ezihlangatshezwana nezinhlanganisela ze-C/C zasekhaya kuseyizinkinga zezindleko kanye nezezimboni.

Ziningi ezinye izinto ezisetshenziselwa ukwenza izinkundla ezishisayo. I-graphite eqiniswe nge-carbon fibre inempahla yomshini engcono; kodwa kubiza kakhulu futhi kunezinye izidingo zokuklama.I-Silicon carbide (SiC)kuyinto engcono kune-graphite ezicini eziningi, kodwa kubiza kakhulu futhi kunzima ukulungisa izingxenye zevolumu enkulu. Kodwa-ke, i-SiC ivame ukusetshenziswa njenge-Ukufakwa kwe-CVDukwandisa ukuphila kwezingxenye ze-graphite ezivezwe kugesi ye-silicon monoxide ebolayo, futhi kunganciphisa nokungcoliswa okuvela ku-graphite. I-CVD eminyene ye-silicon carbide coating ivimbela ngempumelelo ukungcola okungaphakathi kwe-microporous graphite material ukuthi ifinyelele phezulu.

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Enye i-CVD carbon, engase futhi yakhe ungqimba oluminyene ngaphezu kwengxenye yegraphite. Ezinye izinto ezimelana nokushisa okuphezulu, njenge-molybdenum noma izinto ze-ceramic ezingahlala ndawonye nendawo ezungezile, zingasetshenziswa lapho kungekho bungozi bokungcolisa ukuncibilika. Kodwa-ke, izitsha zobumba ze-oxide ngokuvamile zikhawulelwe ekusebenzeni kwazo ezintweni ze-graphite emazingeni okushisa aphezulu, futhi zimbalwa ezinye izinketho uma ukufakwa kuyadingeka. Enye i-hexagonal boron nitride (ngezinye izikhathi ibizwa ngokuthi i-graphite emhlophe ngenxa yezakhiwo ezifanayo), kodwa izakhiwo zemishini zimbi. I-Molybdenum ngokuvamile isetshenziswa ngokunengqondo ezimweni zokushisa okuphezulu ngenxa yezindleko zayo ezilinganiselwe, izinga eliphansi lokusabalalisa kumakristalu e-silicon, kanye ne-coefficient ephansi kakhulu yokuhlukanisa engaba ngu-5 × 108, evumela inani elithile lokungcoliswa kwe-molybdenum ngaphambi kokubhubhisa isakhiwo se-crystal.

 

2. Izinto zokufakelwa ezishisayo

I-insulation material esetshenziswa kakhulu yikhabhoni ezwakala ngezindlela ezahlukene. I-carbon feeling yenziwe ngemicu emincane, esebenza njenge-insulation ngoba ivimba imisebe eshisayo izikhathi eziningi ngebanga elifushane. Ikhabhoni ethambile ezwakalayo ilukwa ibe amashidi ezinto ezincanyana, abe esesikwa abe yisimo esifunwayo futhi agobe aqiniswe abe yiradiyasi enengqondo. Izinsimbi ezilahliwe zakhiwe ngezinto zefayibha ezifanayo, futhi isibopho esinekhabhoni sisetshenziswa ukuxhuma imicu ehlakazekile ibe into eqinile futhi emise okweqile. Ukusetshenziswa komhwamuko wekhemikhali we-carbon esikhundleni se-binder kungathuthukisa izakhiwo zemishini zento.

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Ngokuvamile, ingaphandle le-thermal insulation curing lizwakala limbozwe nge-graphite coating noma i-foil ukunciphisa ukuguguleka nokuguga kanye nokungcoliswa kwezinhlayiya. Ezinye izinhlobo ze-carbon-based thermal insulation materials nazo zikhona, njenge-carbon foam. Ngokuvamile, izinto ezenziwe nge-graphit ngokusobala ziyathandwa ngoba i-graphitization inciphisa kakhulu indawo engaphezulu ye-fiber. Ukukhishwa kwalezi zinto ezisezingeni eliphezulu kuncishiswe kakhulu, futhi kuthatha isikhathi esincane ukupompa isithando endaweni yokucima ukoma efanelekile. Enye into eyinhlanganisela ye-C/C, enezici ezivelele ezifana nesisindo esincane, ukubekezelela umonakalo omkhulu namandla aphezulu. Kusetshenziswa emasimini ashisayo esikhundleni sezingxenye zegraphite kunciphisa kakhulu imvamisa yokushintshwa kwezingxenye zegraphite, kuthuthukisa ikhwalithi ye-monocrystalline nokuzinza kokukhiqiza.

Ngokwesigaba se-raw material, i-carbon feel ingahlukaniswa ibe yi-polyacrylonitrile-based carbon felt, i-viscose-based carbon felt, kanye ne-pitch-based carbon feeling.
I-Polyacrylonitrile-based carbon feeling inokuqukethwe komlotha omkhulu. Ngemuva kokwelashwa okunezinga lokushisa eliphezulu, i-fiber eyodwa iba brittle. Ngesikhathi sokusebenza, kulula ukwenza uthuli ukungcolisa imvelo yesithando somlilo. Ngesikhathi esifanayo, i-fiber ingangena kalula kuma-pores kanye nomgudu wokuphefumula womzimba womuntu, okuyingozi empilweni yomuntu. I-Viscose-based carbon feeling inokusebenza okuhle kokufakwa kwe-thermal. Ithambile uma iqhathaniswa nokwelashwa kokushisa futhi akulula ukwenza uthuli. Kodwa-ke, i-cross-section ye-viscose-based fiber eluhlaza ayijwayelekile, futhi kunemifantu eminingi endaweni ye-fiber. Kulula ukukhiqiza amagesi afana ne-C02 ngaphansi komkhathi we-oxidizing wesithando somlilo se-CZ, okubangela ukuna kwezakhi ze-oxygen ne-carbon ku-monocrystalline silicon material. Abakhiqizi abakhulu bahlanganisa i-SGL yaseJalimane nezinye izinkampani. Njengamanje, esetshenziswa kakhulu embonini ye-semiconductor monocrystalline i-pitch-based carbon feeling, enokusebenza okubi kakhulu kwe-thermal insulation kune-viscose-based carbon feeling, kodwa i-pitch-based carbon feeling inokuhlanzeka okuphezulu kanye nokukhipha uthuli oluphansi. Abakhiqizi bahlanganisa i-Kureha Chemical yaseJapan kanye ne-Osaka Gas.
Ngenxa yokuthi ukwakheka kwekhabhoni okuzwakalayo akulungisiwe, akulula ukusebenza. Manje izinkampani eziningi zenze into entsha yokufaka ukufudumala okusekelwe ku-carbon feel-cured carbon feeling. I-cured carbon feeling, ebizwa nangokuthi i-hard feel, i-carbon ezwakalayo enomumo othile kanye nempahla yokuziphilisa ngemuva kokuthi inzwa ethambile ifakwe inhlaka, i-laminated, yelashiwe kanye ne-carbonized.

Izinga lokukhula le-silicon ye-monocrystalline lithinteka ngokuqondile imvelo eshisayo, futhi izinto zokufakelwa kwe-carbon fiber ezishisayo zidlala indima ebalulekile kule ndawo. I-Carbon fibre thermal insulation soft izwakale isenenzuzo enkulu embonini ye-photovoltaic semiconductor ngenxa yenzuzo yayo yezindleko, umphumela omuhle kakhulu wokushisa oshisayo, ukwakheka okuguquguqukayo kanye nokuma okwenziwe ngokwezifiso. Ngaphezu kwalokho, i-carbon fibre hard thermal insulation izwakele izoba nendawo enkulu yokuthuthuka emakethe yezinto ezishisayo ngenxa yamandla ayo athile nokusebenza okuphezulu. Sizibophezele ocwaningweni nasekuthuthukisweni emkhakheni wezinto zokufakelwa ezishisayo, futhi siqhubeka nokwandisa ukusebenza komkhiqizo ukuze sikhuthaze ukuchuma nokuthuthukiswa kwemboni ye-photovoltaic semiconductor.


Isikhathi sokuthumela: Jun-12-2024
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