I-graphite ene-TaC coating

I. Inqubo yokuhlola ipharamitha

1. Uhlelo lwe-TaCl5-C3H6-H2-Ar

2. Izinga lokushisa lokubeka:

Ngokwefomula ye-thermodynamic, kubalwa ukuthi uma izinga lokushisa lingaphezu kuka-1273K, amandla amahhala e-Gibbs okusabela aphansi kakhulu futhi ukusabela kuphelele. I-reaction constant KP inkulu kakhulu ku-1273K futhi ikhula ngokushesha ngezinga lokushisa, futhi izinga lokukhula lehla kancane kancane ku-1773K.

Ithonya ku-morphology engaphezulu ye-coating: Uma izinga lokushisa lingafaneleki (liphezulu kakhulu noma liphansi kakhulu), indawo engaphezulu iveza i-carbon morphology yamahhala noma izimbotshana ezivulekile.

(1) Emazingeni okushisa aphezulu, isivinini sokunyakaza kwama-athomu asebenzayo asabelayo noma amaqembu sishesha kakhulu, okuzoholela ekusabalaliseni okungalingani ngesikhathi sokuqoqwa kwezinto, futhi izindawo ezicebile nezimpofu azikwazi ukuguquka ngokushelelayo, okuholela kuma-pores.

(2) Kunomehluko phakathi kwezinga lokusabela kwe-pyrolysis lama-alkanes kanye nezinga lokusabela elincishisiwe le-tantalum pentachloride. I-pyrolysis carbon idlulele futhi ayikwazi ukuhlanganiswa ne-tantalum ngokuhamba kwesikhathi, okuholela ekubeni ubuso bugoqwe yikhabhoni.

Lapho izinga lokushisa kufanelekile, ebusweni theI-TaC coatingiminyene.

I-TaCizinhlayiya ziyancibilika futhi zihlangane, ifomu lekristalu liphelele, futhi umngcele wokusanhlamvu ushintsha ngokushelela.

3. Isilinganiso se-hydrogen:

Ngaphezu kwalokho, kunezici eziningi ezithinta ikhwalithi yokunamathela:

-Izinga eliphezulu le-Substrate

-Deposition gas field

-Izinga lokufana lokuxutshwa kwegesi esabelayo

II. Amaphutha ajwayelekilei-tantalum carbide enamathela

1. Ukwemboza ukuqhekeka nokuxebuka

I-Linear thermal expansion coefficient yomugqa we-CTE:

2. Ukuhlaziywa kokukhubazeka:

(1) Isizathu:

(2) Indlela yezinhlamvu

① Sebenzisa ubuchwepheshe be-X-ray diffraction ukukala uhlobo olusele.

② Sebenzisa umthetho ka-Hu Ke ukuze ulinganisele ingcindezi esele.

(3) Amafomula ahlobene

3.Thuthukisa ukuhambisana kwemishini kwe-coating kanye ne-substrate

(1) Ukwakheka kwe-surface in-situ ukukhula

Thermal reaction deposition and diffusion technology TRD

Inqubo kasawoti encibilikisiwe

Yenza kube lula inqubo yokukhiqiza

Yehlisa izinga lokushisa lokusabela

Izindleko eziphansi uma kuqhathaniswa

Ivumelana kakhulu nemvelo

Ifanele ukukhiqizwa kwezimboni ezinkulu

(2) Inhlanganisela yenguquko ehlanganisiwe

Inqubo yokubeka ndawonye

I-CVDinqubo

I-Multi-component coating

Ukuhlanganisa izinzuzo zengxenye ngayinye

Lungisa ngokuguquguqukayo ukwakheka kwe-coating kanye nesilinganiso

4. Thermal reaction deposition and diffusion technology TRD

(1) Indlela Yokusabela

Ubuchwepheshe be-TRD bubizwa nangokuthi inqubo yokushumeka, esebenzisa i-boric acid-tantalum pentoxide-sodium fluoride-boron oxide-boron carbide system ukulungisai-tantalum carbide enamathela.

① I-boric acid encibilikisiwe incibilikisa i-tantalum pentoxide;

② I-Tantalum pentoxide iyancipha ibe ama-athomu e-tantalum asebenzayo futhi isakazeke endaweni yegraphite;

③ Ama-athomu e-tantalum asebenzayo akhangiswa endaweni yegraphite futhi ahlangane nama-athomu ekhabhoni ukuze akhe.i-tantalum carbide enamathela.

(2) Ukhiye Wokusabela

Uhlobo lwe-carbide coating kumele lwanelise imfuneko yokuthi ukwakheka kwe-oxidation amandla mahhala we-elementi eyenza i-carbide ephakeme kunaleyo ye-boron oxide.

Amandla amahhala e-Gibbs e-carbide aphansi ngokwanele (kungenjalo, i-boron noma i-boride ingase yakheke).

I-Tantalum pentoxide iyi-oxide engathathi hlangothi. Ku-borax encibilikisiwe yokushisa ephezulu, ingasabela nge-alkaline oxide sodium oxide eqinile ukwenza i-sodium tantalate, ngaleyo ndlela yehlise izinga lokushisa lokuqala lokusabela.