Phakathi nenqubo ye-vapor phase epitaxy (VPE), indima ye-pedestal ukusekela i-substrate nokuqinisekisa ukushisa okufanayo phakathi nenqubo yokukhula. Izinhlobo ezahlukene zezisekelo zifanele izimo ezihlukene zokukhula kanye nezinhlelo zezinto ezibonakalayo. Okulandelayo ezinye zezinhlobo zezinyawo ezivame ukusetshenziswa esigabeni somhwamukoi-epitaxy:
Isisekelo somgqomo
Izisekelo zemiphongolo zivame ukusetshenziswa ezinhlelweni ze-epitaxy zesigaba somphunga esivundlile noma esitshekile. Bangakwazi ukubamba i-substrate futhi bavumele igesi ukuthi igeleze phezu kwe-substrate, okusiza ukufeza ukukhula okufanayo kwe-epitaxial.
I-Pedestal emise okwediski (i-pedestal eqondile)
Izisekelo ezimise okwediskhi zifaneleka kumasistimu we-epitaxy wesigaba somhwamuko esiqondile, lapho i-substrate ibekwe khona iqonde phezulu. Lo mklamo usiza ukwehlisa indawo yokuxhumana phakathi kwe-substrate ne-susceptor, ngaleyo ndlela kunciphise ukulahlekelwa ukushisa kanye nokungcoliswa okungaba khona.
I-susceptor evundlile
Izixhumi ezivundlile azivamile kangako ku-epitaxy yesigaba somhwamuko, kodwa zingasetshenziswa kwezinye izinhlelo zokukhula ezithile ukuze zivumele ukukhula kwe-epitaxial endaweni evundlile.
I-Monolithic epitaxial reaction susceptor
I-monolithic epitaxial reaction susceptor yakhelwe i-substrate eyodwa, enganikeza ukulawulwa kwezinga lokushisa okunembe kakhudlwana kanye nokuhlukaniswa okungcono kokushisa, okulungele ukukhula kwezingqimba ze-epitaxial zekhwalithi ephezulu.
Siyakwamukela kuwebhusayithi yethu ukuze uthole ulwazi lomkhiqizo nokubonisana.
Iwebhusayithi yethu: https://www.vet-china.com/
Isikhathi sokuthumela: Jul-30-2024