Isicelo kanye nezici ze-silicon carbide CVD enamathela

I-Silicon carbide (SiC)iyinto ehlala isikhathi eside eyaziwa ngobulukhuni bayo obuphakeme, ukuqhutshwa kokushisa okuphezulu, nokumelana nokugqwala kwamakhemikhali. Phakathi kwezindlela ezahlukahlukene zokusebenzisa i-SiC endaweni ephezulu,I-CVD SiC coating(I-Chemical Vapor Deposition ye-silicon carbide) igqama ngenxa yekhono layo lokudala ama-uniform, ama-high-purity coatings anokunamathela okuhle kakhulu. Lobu buchwepheshe bubalulekile ezinhlobonhlobo zezinhlelo zokusebenza zezimboni, ikakhulukazi ezindaweni ezishisa kakhulu nezinokhahlo zamakhemikhali.

Izicelo ze-CVD SiC Coating

II-CVD SiC coatinginqubo isetshenziswa kabanzi kuzo zonke izimboni eziningana ngenxa yokuguquguquka kwayo kanye nezinzuzo zokusebenza. Esinye sezicelo eziyinhloko sisekukhiqizweni kwe-semiconductor, lapho izingxenye ezimbozwe nge-SiC zisiza ukuvikela izindawo ezithambile ngesikhathi sokucutshungulwa kwe-wafer. Imishini ene-CVD SiC-coated, efana ne-susceptors, izindandatho, nabathwali be-wafer, iqinisekisa ukuzinza kwezinga lokushisa eliphezulu futhi ivimbela ukungcola phakathi nezigaba zokukhiqiza ezibalulekile.

Embonini ye-aerospace,I-CVD SiC coatingisetshenziswa ezingxenyeni ezivezwe ekushiseni okukhulu nokucindezeleka kwemishini. Ukwemboza kwandisa kakhulu impilo yama-turbine blades namakamelo omlilo, asebenza ngaphansi kwezimo ezinzima. Ukwengeza, i-CVD SiC ivame ukusetshenziswa ekukhiqizeni izibuko namadivayisi abonakalayo ngenxa yezakhiwo zayo zokuzinza nokuzinza okushisayo.

Okunye ukusetshenziswa okubalulekile kwe-CVD SiC kusembonini yamakhemikhali. Lapha, izimbotshana ze-SiC zivikela izingxenye ezifana nezishintshisi zokushisa, ama-seal, namaphampu ezinto ezonakalisayo. Ingaphezulu le-SiC lihlala lingathinteki ngama-asidi nezisekelo, okwenza libe lilungele izindawo lapho ukuqina kwamakhemikhali kubalulekile.

I-CVD Epitaxial Deposition In Barrel Reactor

Izici ze-CVD SiC Coating

Izakhiwo ze-CVD SiC coating yizo eziyenza iphumelele kakhulu kulezi zinhlelo zokusebenza. Esinye sezici zayo eziyinhloko ubulukhuni bayo, ukulinganisa eduze nedayimane esikalini sokuqina se-Mohs. Lobu bunzima obedlulele bunikeza okunamathelayo kwe-CVD SiC ukumelana okuphawulekayo nokuguga nokuhuzuka, kubenze bafanelekele izindawo ezingqubuzana kakhulu.

Ukwengeza, i-SiC ine-conductivity enhle kakhulu yokushisa, evumela izingxenye ezimboziwe ukuthi zigcine ubuqotho bazo ngisho nangaphansi kwamazinga okushisa aphezulu. Lokhu kubaluleke kakhulu ekusetshenzisweni kwe-semiconductor kanye ne-aerospace, lapho izinto ezisetshenziswayo kufanele zimelane nokushisa okukhulu kuyilapho zilondoloza amandla esakhiwo.

I-inertness yamakhemikhali ye-CVD SiC coating ingenye inzuzo ephawulekayo. Imelana ne-oxidation, ukugqwala, nokusabela kwamakhemikhali ngezinto ezinolaka, okuyenza ibe uqweqwe olufanele lwemishini yokucubungula amakhemikhali. Ngaphezu kwalokho, i-coefficient yayo ephansi yokunwetshwa okushisayo iqinisekisa ukuthi izindawo ezimboziwe zigcina ukwakheka nokusebenza kwazo ngisho nangaphansi kwezimo zamabhayisikili ezishisayo.

Isiphetho

Kafushane, i-CVD SiC coating inikeza isisombululo esiqinile, esiphezulu sokusebenza kwezimboni ezidinga izinto ezingakwazi ukubekezelela ukushisa okukhulu, ukucindezeleka kwemishini, nokugqwala kwamakhemikhali. Izicelo zayo zisukela ekwenziweni kwe-semiconductor kuya ku-aerospace kanye nokucutshungulwa kwamakhemikhali, lapho izakhiwo ze-SiC—njengokuqina, ukuzinza okushisayo, nokumelana namakhemikhali—zibalulekile ukuze kuphumelele ukusebenza. Njengoba izimboni ziqhubeka nokuphusha imingcele yokusebenza nokuthembeka, ukumbozwa kwe-CVD SiC kuzohlala kuwubuchwepheshe obubalulekile bokuthuthukisa ukuqina kwengxenye nokuphila isikhathi eside.

Ngokusebenzisa ubuchwepheshe babakhiqizi abakhethekile abafana ne-vet-china, izinkampani zingathola izimbotshana ze-CVD SiC zekhwalithi ephezulu ezihlangabezana nezidingo eziqinile zezinqubo zesimanje zezimboni.


Isikhathi sokuthumela: Dec-18-2023
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