I-MOCVD Substrate Heater, Izinto Zokushisa ze-MOCVD

Incazelo emfushane:

I-Chemical Graphite

Inzuzo:Ukumelana nezinga lokushisa eliphezulu

Isicelo:MOCVD/Vacuum furnace/Hot Zone

Ukuminyana ngobuningi:1.68-1.91g/cm3

Amandla e-Flexural: 30-46Mpa

Ukumelana: 7-12μΩm


Imininingwane Yomkhiqizo

Omaka bomkhiqizo

I-MOCVD Substrate heater, Izinto zokushisisa ze-MOCVD,
graphite heater, I-graphite Semiconductor, ihitha, I-MOCVD Substrate heater,

I-MOCVD Substrate Heater, Izinto Zokushisa ze-MOCVD

I-graphiteihitha:
Igraphite heaterizingxenye zisetshenziswa esithandweni sokushisa esiphezulu esinezinga lokushisa elifinyelele ku-2200 degree endaweni ye-vacuum kanye ne-3000 degree endaweni yegesi deoxidized futhi ifakwe.
Izici eziyinhloko ze-graphiteihitha:
1. ukufana kwesakhiwo sokushisa.
2. conductivity enhle kagesi kanye nomthwalo omkhulu kagesi.
3. ukumelana nokugqwala.
4. i-inoxidizability.
5. ukuhlanzeka kwamakhemikhali aphezulu.
6. amandla aphezulu emishini.
Inzuzo iyonga amandla, inani eliphakeme kanye nokugcinwa okuphansi.
Singakhiqiza i-anti-oxidation nempilo ende ye-graphite crucible, isikhunta se-graphite nazo zonke izingxenye ze-graphite heater.
Imingcele eyinhloko ye-heater graphite:

Ukucaciswa Kwezobuchwepheshe

I-VET-M3

Ukuminyana kwenqwaba (g/cm3)

≥1.85

Okuqukethwe komlotha (PPM)

≤500

Ukuqina Kwasogwini

≥45

Ukumelana Okuqondile (μ.Ω.m)

≤12

Amandla e-Flexural (Mpa)

≥40

Amandla Acindezelayo (Mpa)

≥70

Ubukhulu. Usayizi Wokusanhlamvu (μm)

≤43

I-Coefficient of Thermal Expansion Mm/°C

≤4.4*10-6

I-Graphite heater yesithando somlilo kagesi inezindawo zokumelana nokushisa, ukumelana ne-oxidation, ukuhamba kahle kukagesi kanye namandla angcono wemishini. Singakwazi umshini izinhlobo ezihlukahlukene ze-graphite heater ngokwemiklamo yamakhasimende.

I-MOCVD Substrate Heater, Izinto Zokushisa ze-MOCVDI-MOCVD Substrate Heater, Izinto Zokushisa ze-MOCVD


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