Impilo endeI-SIC Coated Graphite Heaterye-MOCVD K465i, i-Graphite Heater ye-epitaxy,
graphite heater, I-Graphite Heater ye-MOCVD, ihitha, I-SIC Coated Graphite Heater,
I-MOCVD Substrate Heater, Izinto Zokushisa ze-MOCVD
I-graphiteihitha:
Igraphite heaterizingxenye zisetshenziswa esithandweni sokushisa esiphezulu esinezinga lokushisa elifinyelele ku-2200 degree endaweni ye-vacuum kanye ne-3000 degree endaweni yegesi deoxidized futhi ifakwe.
Izici eziyinhloko ze-graphiteihitha:
1. ukufana kwesakhiwo sokushisa.
2. conductivity enhle kagesi kanye nomthwalo omkhulu kagesi.
3. ukumelana nokugqwala.
4. i-inoxidizability.
5. ukuhlanzeka kwamakhemikhali aphezulu.
6. amandla aphezulu emishini.
Inzuzo iyonga amandla, inani eliphakeme kanye nokugcinwa okuphansi.
Singakhiqiza i-anti-oxidation nempilo ende ye-graphite crucible, isikhunta se-graphite nazo zonke izingxenye ze-graphite heater.
Imingcele eyinhloko ye-heater graphite:
Ukucaciswa Kwezobuchwepheshe | I-VET-M3 |
Ukuminyana kwenqwaba (g/cm3) | ≥1.85 |
Okuqukethwe komlotha (PPM) | ≤500 |
Ukuqina Kwasogwini | ≥45 |
Ukumelana Okuqondile (μ.Ω.m) | ≤12 |
Amandla e-Flexural (Mpa) | ≥40 |
Amandla Acindezelayo (Mpa) | ≥70 |
Ubukhulu. Usayizi Wokusanhlamvu (μm) | ≤43 |
I-Coefficient of Thermal Expansion Mm/°C | ≤4.4*10-6 |
I-Graphite heater yesithando somlilo kagesi inezindawo zokumelana nokushisa, ukumelana ne-oxidation, ukuhamba kahle kukagesi kanye namandla angcono wemishini. Singakwazi umshini izinhlobo ezihlukahlukene ze-graphite heater ngokwemiklamo yamakhasimende.