Izidingo zemboni ye-semiconductor yezidingo zezinto ze-graphite ziphezulu kakhulu, usayizi wezinhlayiyana ezinhle zegraphite unokunemba okuphezulu, ukumelana nokushisa okuphezulu, amandla aphezulu, ukulahlekelwa okuncane nezinye izinzuzo, njenge: isikhunta semikhiqizo ye-graphite ehlanganisiwe.Ngenxa yokuthi imishini ye-graphite esetshenziswa embonini ye-semiconductor (kuhlanganise nezifudumezi kanye ne-sintered dies) iyadingeka ukuze imelane nezinqubo zokufudumeza nokupholisa okuphindaphindiwe, ukuze kwandiswe impilo yesevisi yemishini ye-graphite, ngokuvamile kuyadingeka ukuthi izinto ze-graphite ezisetshenzisiwe zibe nokusebenza okuzinzile. kanye nomsebenzi wokumelana nokushisa.
01 Izinsiza ze-Graphite zokukhula kwekristalu ye-semiconductor
Zonke izinqubo ezisetshenziselwa ukukhulisa amakristalu e-semiconductor zisebenza ngaphansi kwezinga lokushisa eliphezulu nendawo eyonakalisayo. Indawo eshisayo yesithando somlilo esikhulayo sekristalu ivamise ukuhlonyiswa ngezingxenye zegraphite ezikwazi ukumelana nokushisa futhi zimelana nokugqwala, njenge-heater, crucible, insulation cylinder, guide cylinder, electrode, crucible holder, electrode nut, njll.
Singakwazi ukukhiqiza zonke izingxenye ze-graphite zamadivayisi okukhiqiza amakristalu, anganikezwa ngawodwana noma ngamasethi, noma izingxenye zegraphite ezenziwe ngezifiso ezinobukhulu obuhlukahlukene ngokwezidingo zamakhasimende. Ubukhulu bemikhiqizo bungalinganiswa esizeni, futhi okuqukethwe komlotha wemikhiqizo eqediwe kungaba ngaphansikwe 5ppm.
02 Izesekeli ze-graphite ze-semiconductor epitaxy
Inqubo ye-Epitaxial ibhekisela ekukhuleni kongqimba lwekristalu eyodwa enokuhlelwa okufanayo kwe-lattice njenge-substrate ku-crystal substrate eyodwa. Enqubweni ye-epitaxial, i-wafer ilayishwa kudiski ye-graphite. Ukusebenza kanye nekhwalithi ye-graphite disk kudlala indima ebalulekile kwikhwalithi ye-epitaxial layer ye-wafer. Emkhakheni wokukhiqizwa kwe-epitaxial, i-graphite ehlanzekile ephezulu ephezulu kanye nesisekelo esiphezulu se-graphite esine-SIC coating siyadingeka.
Isisekelo se-graphite yenkampani yethu ye-semiconductor epitaxy inezinhlobonhlobo zezicelo, ingakwazi ukufanisa iningi lemishini evame ukusetshenziswa embonini, futhi inokuhlanzeka okuphezulu, i-uniform coating, impilo yesevisi enhle kakhulu, kanye nokumelana namakhemikhali aphezulu kanye nokuzinza kokushisa.
03 Izesekeli ze-graphite zokufakelwa kwe-ion
Ukufakwa kwe-ion kubhekisela enqubweni yokusheshisa ugongolo lwe-plasma lwe-boron, i-phosphorus ne-arsenic kumandla athile, bese lujova ongqimbeni olungaphezulu lwento eyisilutshwana ukuze kushintshwe izinto ezibonakalayo zongqimba olungaphezulu. Izingxenye zedivayisi yokufakelwa kwe-ion zizokwenziwa ngezinto ezihlanzeke kakhulu ezinokumelana nokushisa okuhle kakhulu, ukuqhutshwa kwe-thermal, ukugqwala okuncane okubangelwa ugongolo lwe-ion nokuqukethwe okuphansi kokungcola. I-graphite ye-high-purity ihlangabezana nezidingo zohlelo lokusebenza, futhi ingasetshenziselwa ithubhu lendiza, ama-slits ahlukahlukene, ama-electrode, izembozo ze-electrode, ama-conduits, izinqamuli ze-beam, njll. zemishini yokufakelwa kwe-ion.
Asikwazi kuphela ukuhlinzeka ngesembozo sokuvikela i-graphite semishini ehlukahlukene yokufakelwa kwe-ion, kodwa futhi sinikeze ama-electrode e-graphite aphezulu kanye nemithombo ye-ion enokumelana nokugqwala okuphezulu kokucaciswa okuhlukahlukene. Amamodeli asebenzayo: Eaton, Azcelis, Quatum, Varian, Nissin, AMAT, LAM nezinye izinto zokusebenza. Ngaphezu kwalokho, singahlinzeka nge-ceramic efanayo, i-tungsten, i-molybdenum, imikhiqizo ye-aluminium nezingxenye eziboshwe.
04 Izinto zokufaka i-graphite nokunye
Izinto zokufakelwa ezishisayo ezisetshenziswa emishinini yokukhiqiza ye-semiconductor zifaka i-graphite ezwakalayo eqinile, ukuzwa okuthambile, ucwecwe lwegraphite, iphepha legraphite, nentambo yegraphite.
Zonke izinto zethu zokusetshenziswa ziyi-graphite engenisiwe, engasikwa ngokwesayizi ethile yezidingo zekhasimende noma ithengiswe iyonke.
Ithreyi ye-carbon-carbon isetshenziswa njengesithwali sokumbozwa kwefilimu ekukhiqizeni i-solar monocrystalline silicon namaseli e-polycrystalline silicon. Umgomo wokusebenza uthi: faka i-silicon chip kuthreyi ye-CFC bese uyithumela eshubhuni yesithando somlilo ukuze ucubungule ukumbozwa kwefilimu.
