Isici Sokushisa Esishisayo Esiphezulu Se-SiC Ehlanganiswe ne-Graphite Heater

Incazelo emfushane:

I-graphite heater iwuhlobo lwezinto zokushisa zikagesi ezikhiqiza ukushisa ngokushisisa izinto zegraphite ngogesi, ngokuvamile ezenziwe ngegraphite nezitsha zobumba. Isakhiwo sayo se-wavy singakhipha ukushisa ngokuphumelelayo futhi sisetshenziswa kabanzi embonini, ekwakhiweni, ezolimo kanye nokuphila kwansuku zonke. Ngenxa ye-conductivity yayo enhle yokushisa kanye nokuzinza okuphezulu kwezinga lokushisa, isici sokushisa se-graphite sisetshenziswa kabanzi embonini.


Imininingwane Yomkhiqizo

Omaka bomkhiqizo

Izici eziyinhloko ze-heater graphite:

1. ukufana kwesakhiwo sokushisa.

2. conductivity enhle kagesi kanye nomthwalo omkhulu kagesi.

3. ukumelana nokugqwala.

4. i-inoxidizability.

5. ukuhlanzeka kwamakhemikhali aphezulu.

6. amandla aphezulu emishini.

Inzuzo iyonga amandla, inani eliphakeme kanye nokugcinwa okuphansi. Singakhiqiza i-anti-oxidation nempilo ende ye-graphite crucible, isikhunta se-graphite nazo zonke izingxenye ze-graphite heater.

I-heater ye-graphite (4)

Imingcele eyinhloko ye-graphite heater

Ukucaciswa Kwezobuchwepheshe I-Semicera-M3
Ukuminyana kwenqwaba (g/cm3) ≥1.85
Okuqukethwe komlotha (PPM) ≤500
Ukuqina Kwasogwini ≥45
Ukumelana Okuqondile (μ.Ω.m) ≤12
Amandla e-Flexural (Mpa) ≥40
Amandla Acindezelayo (Mpa) ≥70
Ubukhulu. Usayizi Wokusanhlamvu (μm) ≤43
I-Coefficient of Thermal Expansion Mm/°C ≤4.4*10-6

I-VET Energy yiyona iumkhiqizi wangempela wemikhiqizo eyenziwe ngokwezifiso ye-graphite ne-silicon carbide ene-CVD coating,angahlinzekaezihlukahlukeneizingxenye ezenziwe ngokwezifiso ze-semiconductor kanye nemboni ye-photovoltaic. OIthimba le-ur lochwepheshe livela ezikhungweni eziphezulu zocwaningo lwasekhaya, linganikeza izixazululo zempahla echwepheshilekwakho.

Siyaqhubeka nokuthuthukisa izinqubo ezithuthukile ukuze sinikeze izinto ezithuthuke kakhulu,futhibenze ubuchwepheshe obukhethekile obunelungelo lobunikazi, obungenza ukubopha phakathi kokumboza ne-substrate kuqine futhi kungabi lula ukuhlukaniswa.

Fukudla kwemikhiqizo yethu:

1. Ukumelana nokushisa okuphezulu kwe-oxidation kufika ku-1700.
2. Ukuhlanzeka okuphezulu kanyeukufana okushisayo
3. Ukumelana nokugqwala okuhle kakhulu: i-asidi, i-alkali, usawoti kanye nama-organic reagents.
4. Ukuqina okuphezulu, indawo ehlangene, izinhlayiya ezinhle.
5. Impilo yesevisi ende futhi ihlala isikhathi eside

I-CVD SiC薄膜基本物理性能

Izakhiwo eziyisisekelo ze-CVD SiCenamathela

性质 / Impahla

典型数值 / Inani Elijwayelekile

晶体结构 / Isakhiwo seCrystal

I-FCC β isigaba多晶,主要為(111)取向

密度 / Ukuminyana

3.21 g/cm³

硬度 / Ukuqina

2500 维氏硬度 (500g umthwalo)

晶粒大小 / Uhlamvu SiZe

2 ~ 10μm

纯度 / Ukuhlanzeka Kwamakhemikhali

99.99995%

热容 / Amandla Okushisa

640 J·kg-1·K-1

升华温度 / I-Sublimation Temperature

2700 ℃

抗弯强度 / Amandla Aguquguqukayo

415 MPa RT 4-iphoyinti

杨氏模量 / I-Modulus Encane

430 Gpa 4pt ukugoba, 1300℃

导热系数 / ThermalI-Conductivity

300Wm-1·K-1

热膨胀系数 / Ukwandiswa Kokushisa (CTE)

4.5×10-6K-1

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