SiC ti a bo le ti wa ni pese sile nipa kemikali vapor deposition (CVD), precursor transformation, pilasima spraying, bbl Awọn ti a bo ti pese sile nipa CHEMICAL vapor deposition jẹ aṣọ ati iwapọ, ati ki o ni o dara designability. Lilo methyl trichlosilane. (CHzSiCl3, MTS) bi orisun ohun alumọni, murasilẹ ibora SiC…
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