Yintoni umahluko phakathi kwe-PECVD kunye ne-LPCVD kwisixhobo se-semiconductor CVD?

Ukubekwa komphunga kwikhemikhali (CVD) ibhekisa kwinkqubo yokufaka ifilimu eqinileyo kumphezulu wesiliconiqhekeza lesonkangokusabela kwekhemikhali yomxube werhasi. Ngokweemeko ezahlukeneyo zokusabela (uxinzelelo, isandulela), inokwahlulwa ngokweemodeli zezixhobo ezahlukeneyo.

Zeziphi iinkqubo ezisetyenziselwa ntoni ezi zixhobo zibini?

I-PECVD(I-Plasma Enhanced) izixhobo zezona zininzi kwaye zisetyenziswa ngokuqhelekileyo, ezisetyenziswa kwi-OX, i-Nitride, isango lesinyithi, i-amorphous carbon, njl.; I-LPCVD (Amandla aphantsi) idla ngokusetyenziswa kwi-Nitride, i-poly, i-TEOS.
Uthini umgaqo?
I-PECVD-inkqubo edibanisa ngokugqibeleleyo amandla e-plasma kunye ne-CVD. Itekhnoloji ye-PECVD isebenzisa i-plasma yobushushu obuphantsi ukuze ibangele ukukhutshwa okukhanyayo kwi-cathode yegumbi lenkqubo (oko kukuthi, i-tray yesampula) phantsi koxinzelelo oluphantsi. Oku kukhutshwa okukhanyayo okanye esinye isixhobo sokufudumeza kunokunyusa ubushushu besampulu ukuya kwinqanaba elimiselweyo, kwaye emva koko ungenise isixa esilawulwayo segesi yenkqubo. Le gesi idlula uluhlu lweekhemikhali kunye neeplasma reactions, kwaye ekugqibeleni yenza ifilimu eqinile kumphezulu wesampuli.

I-LPCVD - I-low-pressure chemical vapor deposition (LPCVD) yenzelwe ukunciphisa uxinzelelo lokusebenza lwegesi yokusabela kwi-reactor malunga ne-133Pa okanye ngaphantsi.

Ziziphi iimpawu zomntu ngamnye?

I-PECVD - Inkqubo edibanisa ngokugqibeleleyo amandla e-plasma kunye ne-CVD: 1) Ukusebenza okuphantsi kweqondo lokushisa (ukuphepha umonakalo ophezulu wokushisa kwisixhobo); 2) Ukukhula kwefilimu ngokukhawuleza; I-3) Ayikhethi malunga nezixhobo, i-OX, i-Nitride, isango lesinyithi, i-amorphous carbon inokukhula yonke; I-4) Kukho inkqubo yokubeka iliso kwi-situ, engakwazi ukulungelelanisa iresiphi ngokusebenzisa iiparamitha ze-ion, izinga lokuhamba kwegesi, ubushushu kunye nobukhulu befilimu.
I-LPCVD - Iifilim ezibhityileyo ezifakwe yi-LPCVD ziya kuba nokugutyungelwa ngamanyathelo angcono, ukwakheka okulungileyo kunye nolawulo lwesakhiwo, izinga eliphezulu lokubekwa kunye nemveliso. Ukongeza, i-LPCVD ayifuni igesi yokuthwala, ngoko inciphisa kakhulu umthombo wongcoliseko lwamasuntswana kwaye isetyenziswa ngokubanzi kumashishini e-semiconductor exabiso elongeziweyo lokubekwa kwefilimu encinci.

 

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