Isithando somlilo sekristale esisodwa sisixhobo esisebenzisa aisifudumezi segraphiteukunyibilikisa izinto ze-silicon ze-polycrystalline kwindawo yegesi engasebenziyo (argon) kwaye isebenzisa indlela yeCzochralski ukukhulisa iikristale ezingasuswanga. Ukakhulu iqulunqwe zezi nkqubo zilandelayo:
Inkqubo yokuhanjiswa koomatshini
Inkqubo yokuhanjiswa komatshini yinkqubo esisiseko yokusebenza yesithando somlilo sekristale, eyona nto inoxanduva lokulawula ukuhamba kweekristale kunye.iminqamlezo, kubandakanywa nokuphakanyiswa kunye nokujikeleza kweekristale zembewu kunye nokuphakanyiswa kunye nokujikelezaiminqamlezo. Iyakwazi ukulungelelanisa ngokuchanekileyo iiparitha ezifana nesikhundla, isantya kunye ne-angle yokujikeleza ye-crystals kunye ne-crucibles ukuqinisekisa inkqubela phambili yenkqubo yokukhula kwe-crystal. Ngokomzekelo, kwiinqanaba ezahlukeneyo zokukhula kwe-crystal ezifana nembewu, intamo, ihlombe, ukukhula okulinganayo kobubanzi kunye nomsila, ukunyakaza kweekristale zembewu kunye neengqungquthela kufuneka zilawulwe ngokuchanekileyo yile nkqubo ukuhlangabezana neemfuno zenkqubo yokukhula kwe-crystal.
Inkqubo yokulawula ubushushu bokufudumala
Le yenye yeenkqubo ezingundoqo zesithando somlilo sekristale esisodwa, esisetyenziselwa ukuvelisa ukushisa kunye nokulawula ngokuchanekileyo ubushushu kwisithando somlilo. Ubukhulu becala iqulunqwe ngamacandelo afana nezifudumezi, izivamvo zobushushu, kunye nezilawuli zobushushu. Isifudumezi siqhele ukwenziwa ngezinto ezifana negraphite ecocekileyo. Emva kokuba i-alternating current iguqulwe kwaye iyancipha ukwandisa i-current, i-heater ivelisa ukushisa ukunyibilikisa izinto ze-polycrystalline ezifana ne-polysilicon kwi-crucible. Inzwa yeqondo lokushisa ibeka iliso kwiqondo lokushisa kwisithando somlilo ngexesha langempela kwaye idlulisele umqondiso weqondo lokushisa kumlawuli weqondo lokushisa. Umlawuli weqondo lokushisa ulawula ngokuchanekileyo amandla okufudumeza ngokwemilinganiselo yokushisa emiselweyo kunye nomqondiso weqondo lokushisa lempendulo, ngaloo ndlela ugcina ukuzinza kweqondo lokushisa kwisithando somlilo kunye nokubonelela indawo yokushisa efanelekileyo yokukhula kwekristale.
Inkqubo yokufunxa
Umsebenzi oyintloko wenkqubo ye-vacuum kukudala nokugcina indawo yokucima kwisithando somlilo ngexesha lenkqubo yokukhula kwe-crystal. Umoya kunye neegesi ezingcolileyo kwisithando somlilo zikhutshwa ngeempompo ze-vacuum kunye nezinye izixhobo zokwenza uxinzelelo lwegesi kwisithando somlilo lufikelele kwinqanaba eliphantsi kakhulu, ngokubanzi ngaphantsi kwe-5TOR (torr). Oku kunokuthintela izinto ze-silicon ukuba zifakwe kwi-oxidized kumaqondo aphezulu kunye nokuqinisekisa ukucoceka kunye nomgangatho wokukhula kwekristale. Ngelo xesha, indawo yokucoca i-vacuum iphinda incede ukususa ukungcola okuguquguqukayo okwenziwa ngexesha lenkqubo yokukhula kwe-crystal kunye nokuphucula umgangatho we-crystal.
Inkqubo yeArgon
Inkqubo ye-argon idlala indima ekukhuseleni nasekulawuleni uxinzelelo kwisithando somlilo kwi-crystal eyodwa. Emva kokucoca, igesi ye-argon ecocekileyo (ucoceko kufuneka lube ngaphezu kwe-6 9) izaliswe kwisithando somlilo. Ngakolunye uhlangothi, inokuthintela umoya wangaphandle ukuba ungangeni esithandweni kwaye uthintele izinto ze-silicon ukuba zibe oxidized; ngakolunye uhlangothi, ukuzaliswa kwegesi ye-argon kunokugcina uxinzelelo kwisigxina somlilo kwaye unikeze indawo yoxinzelelo olufanelekileyo lokukhula kwekristale. Ukongezelela, ukuhamba kwegesi ye-argon kunokuphinda kuthathe ukushisa okwenziwa ngexesha lenkqubo yokukhula kwekristale, idlala indima ethile yokupholisa.
Inkqubo yokupholisa amanzi
Umsebenzi wenkqubo yokupholisa amanzi kukupholisa amacandelo ahlukeneyo obushushu obuphezulu kwesithando somlilo se-crystal enye ukuqinisekisa ukusebenza okuqhelekileyo kunye nobomi benkonzo yezixhobo. Ngexesha lokusebenza kwesithando somlilo sekristale esinye, isifudumezi,i-crucible, i-electrode kunye namanye amacandelo aya kuvelisa ubushushu obuninzi. Ukuba azipholiswanga ngexesha, izixhobo ziya kutshisa, zigqwethe okanye zonakaliswe. Inkqubo yokupholisa amanzi ithatha ubushushu bala macandelo ngokujikeleza kwamanzi okupholisa ukugcina ubushushu besixhobo ngaphakathi koluhlu olukhuselekileyo. Ngelo xesha, inkqubo yokupholisa amanzi inokuncedisa ekulungiseni ubushushu kwisithando somlilo ukuphucula ukuchaneka kokulawula ukushisa.
Inkqubo yokulawula umbane
Inkqubo yokulawula umbane "yingqondo" yesithando somlilo esisodwa se-crystal, esijongene nokubeka iliso kunye nokulawula ukusebenza kwezixhobo zonke. Iyakwazi ukufumana imiqondiso evela kwii-sensors ezahlukeneyo, ezifana nezinzwa zeqondo lokushisa, i-pressure sensors, i-sensor ye-position, njl., kunye nokulungelelanisa kunye nokulawula inkqubo yokuhanjiswa komatshini, inkqubo yokulawula ubushushu bokufudumala, inkqubo ye-vacuum, inkqubo ye-argon kunye nenkqubo yokupholisa amanzi ngokusekelwe kule miqondiso. Ngokomzekelo, ngexesha lenkqubo yokukhula kwekristale, inkqubo yokulawula umbane iyakwazi ukulungelelanisa ngokuzenzekelayo amandla okufudumala ngokuhambelana nomqondiso wokushisa owenziwe yinzwa yokushisa; ngokukhula kwekristale, inokulawula isantya sokuhamba kunye ne-angle yokujikeleza ye-crystal yembewu kunye ne-crucible. Ngexesha elifanayo, inkqubo yokulawula umbane nayo inokuxilongwa kwephutha kunye nemisebenzi ye-alamu, ekwazi ukubona iimeko ezingaqhelekanga zezixhobo ngexesha kwaye iqinisekise ukusebenza ngokukhuselekileyo kwezixhobo.
Ixesha lokuposa: Sep-23-2024