Ngethuba lenkqubo ye-vapor phase epitaxy (VPE), indima ye-pedestal kukuxhasa i-substrate kunye nokuqinisekisa ukufudumeza okufanayo ngexesha lokukhula. Iindidi ezahlukeneyo zeepedestal zifanelekile kwiimeko ezahlukeneyo zokukhula kunye neenkqubo zezinto eziphathekayo. Oku kulandelayo zezinye zeendlela ezisetyenziswa ngokuqhelekileyo kwisigaba somphungai-epitaxy:
Isiseko somphanda
Iziseko zomgqomo ziqhele ukusetyenziswa kwiinkqubo ze-epitaxy zesigaba somphunga esithe tyaba okanye esithambekileyo. Bangakwazi ukubamba i-substrate kwaye bavumele igesi ukuba ihambe phezu kwe-substrate, enceda ukufezekisa ukukhula okufanayo kwe-epitaxial.
idisc-shaped pedestal (isiseko esithe nkqo)
Iziseko ze-disc-shaped pedestals zifanelekile kwiinkqubo ze-epitaxy zesigaba somphunga, apho i-substrate ibekwe ngokuthe nkqo. Olu luyilo lunceda ukunciphisa indawo yoqhagamshelwano phakathi kwe-substrate kunye ne-susceptor, ngaloo ndlela ukunciphisa ukulahleka kobushushu kunye nokungcoliseka okunokwenzeka.
Isixhasi esithe tye
I-susceptors ethe tyaba ayixhaphakanga kwisigaba somphunga se-epitaxy, kodwa inokusetyenziswa kwiinkqubo ezithile zokukhula ukuvumela ukukhula kwe-epitaxial kwicala elithe tye.
I-monolithic epitaxial reaction susceptor
I-monolithic epitaxial reaction susceptor yenzelwe i-substrate enye, enokubonelela ngolawulo oluchanekileyo lweqondo lokushisa kunye ne-thermal isolation engcono, efanelekileyo ekukhuleni kwemigangatho ye-epitaxial ephezulu.
Wamkelekile kwiwebhusayithi yethu ngolwazi lwemveliso kunye nokubonisana.
Iwebhusayithi yethu: https://www.vet-china.com/
Ixesha lokuposa: Jul-30-2024