Ukusetyenziswa kwe-silicon carbide ceramics kwintsimi ye-semiconductor

Izinto ezikhethiweyo zeendawo ezichanekileyo zoomatshini be-photolithography

Kwintsimi ye-semiconductor,i-silicon carbide ceramicizixhobo zisetyenziswa ikakhulu kwizixhobo eziphambili zokwenziwa kweesekethe ezidityanisiweyo, ezifana ne-silicon carbide worktable, iileyili zesikhokelo,izibonisi, Ceramic suction chuck, iingalo, iidiski zokugaya, izixhobo, njl njl. koomatshini be-lithography.

Iinxalenye ze-silicon carbide ceramickwi-semiconductor kunye nezixhobo zokukhanya

● I-Silicon carbide i-ceramic grinding disc. Ukuba i-disc yokugaya yenziwe ngentsimbi okanye i-carbon steel, ubomi bayo benkonzo bufutshane kwaye i-coefficient yayo yokwandisa i-thermal inkulu. Ngexesha lokucutshungulwa kwee-wafers ze-silicon, ngakumbi ngexesha lokusila okanye ukupolisha ngesantya esiphezulu, ukunxitywa kunye nokuguqulwa kwe-thermal yediski yokusila kwenza kube nzima ukuqinisekisa ukucaca kunye nokuhambelana kwe-silicon wafer. Idiski yokusila eyenziwe nge-silicon carbide ceramics inobulukhuni obuphezulu kunye nokunxiba okuphantsi, kwaye i-coefficient yokwandisa i-thermal iyafana naleyo yee-silicone wafers, ngoko inokucolwa kwaye ipoliswe ngesantya esiphezulu.
● I-silicon ye-carbide ye-ceramic fixture. Ukongeza, xa ii-wafers ze-silicon ziveliswa, kufuneka zingene kunyango lobushushu obuphezulu kwaye zihlala zithuthwa kusetyenziswa izixhobo ze-silicon carbide. Ziyakwazi ukumelana nobushushu kwaye zingonakalisi. Ikhabhoni efana nedayimane (i-DLC) kunye nezinye iingubo zokwaleka zingafakwa kumphezulu wokuphucula ukusebenza, ukunciphisa umonakalo owenziwe nge-wafer, kunye nokuthintela ukosuleleka ekusasazekeni.
● I-Silicon carbide worktable. Ukuthatha i-worktable kumatshini we-lithography njengomzekelo, i-worktable iyona nto ixanduva lokugqiba ukunyakaza kwe-exposure, kufuna i-speed-speed, i-stroke enkulu, i-degree-six-of-freedom nano-level ultra-precision movement. Ngokomzekelo, kumatshini we-lithography onesisombululo se-100nm, ukuchaneka kokugqithisa kwe-33nm, kunye nobubanzi bomgca we-10nm, ukuchaneka kwendawo yokusebenza kuyadingeka ukufikelela kwi-10nm, i-mask-silicon wafer yokunyathela ngaxeshanye kunye nesantya sokuskena yi-150nm / s. kunye ne-120nm / s ngokulandelanayo, kunye nesantya sokuskena imaski sisondele kwi-500nm / s, kwaye i-worktable kufuneka ibe nokuchaneka okuphezulu kakhulu kunye nokuzinza.

Umzobo weSchematic wetafile yokusebenza kunye ne-micro-motion table (icandelo lenxalenye)

● I-silicon carbide isibuko se-ceramic square. Amacandelo aphambili kwizixhobo eziphambili zesekethe ezidibeneyo ezinje ngoomatshini be-lithography zinemilo entsonkothileyo, imilinganiselo entsonkothileyo, kunye nezakhiwo ezilula ezingenanto, ezenza kube nzima ukulungiselela amacandelo e-silicon carbide ceramic. Okwangoku, abavelisi bezixhobo zesekethe ezidibeneyo zamazwe ngamazwe, ezifana ne-ASML eNetherlands, i-NIKON kunye ne-CANON eJapan, basebenzisa isixa esikhulu sezinto ezifana neglasi ye-microcrystalline kunye ne-cordierite ukulungiselela izibuko zesikwere, amacandelo angundoqo oomatshini be-lithography, kunye nokusebenzisa i-silicon carbide. ii-ceramics ukulungiselela amanye amacandelo esakhiwo esiphezulu kunye neemilo ezilula. Nangona kunjalo, iingcali ezivela kwiChina Building Materials Research Institute ziye zasebenzisa itekhnoloji yokulungiselela ubunini ukuze kufezekiswe ukulungiswa kobukhulu obukhulu, obuntsonkothileyo, obukhaphukhaphu kakhulu, obuvaleleke ngokupheleleyo besilicon carbide ceramic mirrors square kunye namanye amacandelo esakhiwo kunye nokusebenza optical kumatshini we-lithography.