Ukusetyenziswa kunye neempawu ze-silicon carbide ye-CVD yokugquma

I-silicon carbide (SiC)yimathiriyeli ehlala ixesha elide eyaziwa ngokuba lukhuni kwayo, i-thermal conductivity ephezulu, kunye nokuchasana nokubola kweekhemikhali. Phakathi kweendlela ezahlukeneyo zokusebenzisa i-SiC kumphezulu,CVD SiC ukutyabeka(I-Chemical Vapor Deposition ye-silicon carbide) igqamile ngenxa yokukwazi ukwenza iyunifomu, i-high-purity coatings kunye ne-adhesion egqwesileyo. Le teknoloji ibalulekile kuluhlu olubanzi lwezicelo zemizi-mveliso, ngakumbi kwiindawo ezinobushushu obuphezulu kunye neekhemikhali eziqatha.

Usetyenziso lwe-CVD SiC Coating

ICVD SiC ukutyabekaInkqubo isetyenziswa ngokubanzi kumashishini amaninzi ngenxa yokuguquguquka kwayo kunye neenzuzo zokusebenza. Esinye sezicelo eziphambili kukwenziwa kwesemiconductor, apho izinto ezigqunywe nge-SiC zinceda ukukhusela iindawo ezibuthathaka ngexesha lokusetyenzwa kwe-wafer. Izixhobo ze-CVD SiC-coated, ezifana ne-susceptors, imisesane, kunye nabathwali be-wafer, iqinisekisa ukuzinza okuphezulu kobushushu kunye nokuthintela ukungcoliseka ngexesha lezigaba ezibalulekileyo zokuvelisa.

Kwishishini le-aerospace,CVD SiC ukutyabekaisetyenziswe kumacandelo abonakaliswe kubushushu obugqithisileyo kunye noxinzelelo lomatshini. Ukugquma kwandisa kakhulu ubomi be-injini ye-injini kunye namagumbi okutsha, asebenza phantsi kweemeko ezinzima. Ukongezelela, i-CVD SiC isetyenziswa ngokuqhelekileyo kwimveliso yezibuko kunye nezixhobo ezibonakalayo ngenxa yezinto ezibonisayo kunye nokuzinza kwe-thermal.

Olunye usetyenziso oluphambili lwe-CVD SiC kushishino lweekhemikhali. Apha, iingubo ze-SiC zikhusela izinto ezinje ngokutshintshiselana kobushushu, amatywina, kunye neempompo ezivela kwizinto ezitshabalalisayo. Umphezulu we-SiC uhlala ungachatshazelwa yi-acids kunye neziseko, okwenza kube yinto efanelekileyo kwiindawo apho ukuqina kweekhemikhali kubalulekile.

I-CVD Epitaxial Deposition kwi-Barel Reactor

Iimpawu zeCVD SiC Coating

Iipropathi ze-CVD SiC coating zezona zenza ukuba zisebenze kakhulu kwezi zicelo. Enye yeempawu zayo eziphambili bubulukhuni bayo, ibekwe kufutshane nedayimani kwisikali sobulukhuni be-Mohs. Obu bunzima bugqithileyo bunika iingubo ze-CVD SiC ukuxhathisa okuphawulekayo ukunxitywa kunye nokukrazula, kubenze bafanelekele iindawo ezinobunzima obuphezulu.

Ukongeza, i-SiC ine-conductivity egqwesileyo ye-thermal, evumela ukuba izinto ezigqunyiweyo zigcine ingqibelelo yazo naphantsi kobushushu obuphezulu. Oku kubaluleke ngakumbi kwi-semiconductor kunye nosetyenziso lwe-aerospace, apho izinto kufuneka zimelane nobushushu obugqithisileyo ngelixa zigcina amandla okwakhiwa.

I-inertness yekhemikhali ye-CVD SiC yokugquma yenye inzuzo ephawulekayo. Ixhathisa i-oxidation, i-corrosion, kunye ne-chemical reactions kunye nezinto ezinobundlobongela, iyenza ibe yinto efanelekileyo yokugqoka izixhobo zokulungisa imichiza. Ngaphezu koko, i-coefficient yayo ephantsi yokwandiswa kwe-thermal iqinisekisa ukuba iindawo ezifihliweyo zigcina imilo yazo kwaye zisebenza naphantsi kweemeko zokuhamba ngebhayisikili.

Ukuqukumbela

Isishwankathelo, i-CVD SiC coating inikezela ngesisombululo esiqinileyo, esisebenza kakhulu kumashishini afuna izinto ezinokunyamezela ukushisa okukhulu, uxinzelelo lomatshini, kunye nokubola kweekhemikhali. Izicelo zayo zivela kwimveliso ye-semiconductor ukuya kwi-aerospace kunye nokulungiswa kweekhemikhali, apho iipropati ze-SiC-ezifana nobunzima, ukuzinza kwe-thermal, kunye nokuchasana kweekhemikhali-zibalulekile kwimpumelelo yokusebenza. Njengoko amashishini eqhubeka nokutyhala imida yokusebenza kunye nokuthembeka, iingubo ze-CVD SiC ziya kuhlala ziyitekhnoloji ephambili yokuphucula ukuqina kwecandelo kunye nokuphila ixesha elide.

Ngokusebenzisa ubuchule babavelisi abakhethekileyo njenge-vet-china, iinkampani zinokufumana iingubo ezikumgangatho ophezulu zeCVD SiC ezihlangabezana neemfuno ezingqongqo zeenkqubo zale mihla zemizi-mveliso.


Ixesha lokuposa: Dec-18-2023
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