Iimfuno zeshishini le-semiconductor yeemfuno zezinto zegraphite ziphezulu kakhulu, ubungakanani besuntswana elihle legraphite linokuchaneka okuphezulu, ukuchasana nobushushu obuphezulu, amandla aphezulu, ilahleko encinci kunye nezinye iingenelo, ezinje: iimveliso zegraphite ze-sintered ngundo.Ngenxa yokuba izixhobo zegraphite ezisetyenziswa kwishishini le-semiconductor (kubandakanywa nezifudumezi kunye nee-sintered dies) zifuneka ukuba zimelane nokufudumeza okuphindaphindiweyo kunye neenkqubo zokupholisa, ukuze kwandiswe ubomi benkonzo yezixhobo zegraphite, ngokuqhelekileyo kufuneka ukuba izinto zegraphite ezisetyenzisiweyo zibe nokusebenza okuzinzileyo. kunye nomsebenzi wempembelelo yokumelana nobushushu.
01 izincedisi zeGraphite zokukhula kwekristale yesemiconductor
Zonke iinkqubo ezisetyenziselwa ukukhulisa iikristale zesemiconductor zisebenza phantsi kobushushu obuphezulu kunye nemekobume eyonakalisayo. Indawo eshushu yesithando somlilo sokukhula kwekristale idla ngokuxhotyiswa ngezinto ezikwazi ukumelana nobushushu kunye ne-corrosion-resistant-high-purity-purity graphite, ezifana ne-heater, i-crucible, i-insulation cylinder, i-cylinder yesikhokelo, i-electrode, i-crucible holder, i-electrode nut, njl.
Sinokwenza zonke iindawo zegraphite zezixhobo zokuvelisa i-crystal, ezinokubonelelwa ngabanye okanye kwiiseti, okanye iinxalenye zegraphite ezenziwe ngokwezifiso zobukhulu obahlukeneyo ngokweemfuno zabathengi. Ubungakanani beemveliso bunokulinganiswa kwisayithi, kwaye umxholo womlotha weemveliso ezigqityiweyo unokuba ngaphantsingaphezu kwe5ppm.
02 Izincedisi zegrafu ze-semiconductor epitaxy
Inkqubo ye-Epitaxial ibhekisela ekukhuleni komgangatho we-crystal material enye kunye nelungiselelo elifanayo le-lattice njenge-substrate kwi-crystal substrate enye. Kwinkqubo ye-epitaxial, i-wafer ilayishwe kwi-graphite disk. Ukusebenza kunye nomgangatho wediski yegraphite idlala indima ebalulekileyo kumgangatho we-epitaxial layer ye-wafer. Kwintsimi yemveliso ye-epitaxial, i-graphite eninzi ye-ultra-high purity kunye nesiseko esiphezulu se-graphite esine-coating ye-SIC siyafuneka.
Isiseko segraphite yenkampani yethu ye-semiconductor epitaxy inoluhlu olubanzi lwezicelo, inokuhambelana nezixhobo ezininzi ezisetyenziswa ngokuqhelekileyo kwishishini, kwaye inobunyulu obuphezulu, isambatho esifanayo, ubomi benkonzo obugqwesileyo, kunye nokuchasana kweekhemikhali eziphezulu kunye nokuzinza kwe-thermal.
03 Izincedisi zegrafu zokufakelwa kwe-ion
Ukufakelwa kwe-ion kubhekiselele kwinkqubo yokukhawulezisa umqadi weplasma we-boron, i-phosphorus kunye ne-arsenic kumandla athile, kwaye emva koko ugalelwe kumphezulu we-wafer material ukuguqula izinto eziphathekayo zomaleko ongaphezulu. Amacandelo esixhobo sokufakelwa kwe-ion iya kwenziwa ngezinto ezihlambulukileyo eziphezulu ezinokumelana nokushisa okukhulu, i-thermal conductivity, i-corrosion encinci ebangelwa yi-ion beam kunye nomxholo ophantsi wokungcola. I-graphite ecocekileyo ihlangabezana neemfuno zesicelo, kwaye ingasetyenziselwa ityhubhu yendiza, i-slits eyahlukeneyo, i-electrode, i-electrode covers, i-conduits, i-terminators ye-beam, njl. zezixhobo zokufakelwa kwe-ion.
Asikwazi ukubonelela kuphela isikhuselo se-graphite yokukhusela oomatshini abahlukeneyo bokufakelwa kwe-ion, kodwa kwakhona ukubonelela nge-electrode ye-graphite ecocekileyo kunye nemithombo ye-ion kunye nokumelana okuphezulu kwe-corrosion yezinto ezahlukeneyo. Iimodeli ezisebenzayo: Eaton, Azcelis, Quatum, Varian, Nissin, AMAT, LAM kunye nezinye izixhobo. Ukongeza, sinokubonelela nge-ceramic ehambelanayo, i-tungsten, i-molybdenum, iimveliso ze-aluminiyam kunye neendawo ezigqunyiweyo.
04 Izixhobo zokugquma igrafu kunye nezinye
Izinto zokugquma i-thermal ezisetyenziswa kwisixhobo sokuvelisa i-semiconductor ziquka i-graphite hard feel, imvakalelo ethambileyo, ifoyile yegraphite, iphepha legraphite, kunye nentambo yegraphite.
Zonke izinto zethu eziluhlaza zithunyelwa ngaphandle kwegraphite, ezinokusikwa ngokobungakanani obuthile beemfuno zomthengi okanye zithengiswe ngokupheleleyo.
I-carbon-carbon tray isetyenziselwa ukuthwala ifilimu yokugubungela kwinkqubo yokuvelisa i-silicon ye-solar monocrystalline kunye neeseli ze-silicon ze-polycrystalline. Umgaqo osebenzayo ngulo: faka i-silicon chip kwi-tray ye-CFC kwaye uyithumele kwityhubhu yesithando somlilo ukucubungula ifilimu yokugquma.
