Ho beha mouoane oa lik'hemik'hale (CVD) e bua ka mokhoa oa ho kenya filimi e tiileng holim'a siliconsephaphathaka ts'ebetso ea lik'hemik'hale ea motsoako oa khase. Ho ea ka maemo a fapaneng a karabelo (khatello, precursor), e ka aroloa ka mefuta e fapaneng ea lisebelisoa.
Lisebelisoa tsee tse peli li sebelisetsoa mekhoa efe?
PECVD(Plasma Enhanced) lisebelisoa ke tse ngata ka ho fetisisa le tse sebelisoang ka ho fetisisa, tse sebelisoang ho OX, Nitride, heke ea tšepe, carbon amorphous, joalo-joalo; LPCVD (Low Power) hangata e sebelisoa ho Nitride, poly, TEOS.
Molao-motheo ke ofe?
PECVD - mokhoa o kopanyang ka ho phethahetseng matla a plasma le CVD. Theknoloji ea PECVD e sebelisa plasma ea mocheso o tlaase ho etsa hore ho be le khanya e khanyang ka har'a cathode ea kamore ea ts'ebetso (ke hore, mohlala oa tray) tlas'a khatello e tlaase. Phallo ena e khanyang kapa sesebelisoa se seng sa ho futhumatsa se ka phahamisa mocheso oa sampuli ho ea boemong bo reriloeng esale pele, ebe se hlahisa palo e laoloang ea khase ea ts'ebetso. Khase ena e kena letotong la liphetoho tsa lik'hemik'hale le plasma, 'me qetellong e etsa filimi e tiileng holim'a sampuli.
LPCVD - Low-pressure chemical vapor deposition (LPCVD) e etselitsoe ho fokotsa khatello ea ts'ebetso ea khase e arabelang ho reactor ho hoo e ka bang 133Pa kapa ka tlase.
Litšobotsi tsa e mong le e mong ke life?
PECVD - Mokhoa o kopanyang ka ho phethahetseng matla a plasma le CVD: 1) Ts'ebetso ea mocheso o tlaase (ho qoba ho senyeha ha mocheso o phahameng ho thepa); 2) Khōlo ea filimi e potlakileng; 3) Ho se khetholle lisebelisoa, OX, Nitride, heke ea tšepe, k'habone ea amorphous e ka hola kaofela; 4) Ho na le sistimi ea ho beha leihlo in-situ, e ka fetolang risepe ka liparamente tsa ion, sekhahla sa phallo ea khase, mocheso le botenya ba filimi.
LPCVD - Lifilimi tse tšesaane tse kentsoeng ke LPCVD li tla ba le tšireletso e ntle ka ho fetisisa, sebopeho se setle le taolo ea sebopeho, sekhahla se phahameng sa deposition le tlhahiso. Ho feta moo, LPCVD ha e hloke khase e tsamaisang thepa, kahoo e fokotsa haholo mohloli oa tšilafalo ea likaroloana 'me e sebelisoa haholo liindastering tsa boleng bo phahameng ba semiconductor bakeng sa ho beha lifilimi tse tšesaane.
Amohela bareki leha e le bafe ba tsoang lefats'eng lohle ho re etela bakeng sa puisano e eketsehileng!
https://www.vet-china.com/
https://www.vet-china.com/cvd-coating/
https://www.vet-china.com/silicon-carbide-sic-ceramic/
Nako ea poso: Jul-24-2024