Sekoaelo sa silicon carbide,e tsejoang ka hore ke SiC coating, e bolela mokhoa oa ho sebelisa lera la silicon carbide holim'a bokaholimo ka mekhoa e kang Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), kapa ho fafatsa ka mocheso. Sekoaelo sena sa silicon carbide ceramic se ntlafatsa thepa ea bokaholimo ba li-substrates tse fapaneng ka ho fana ka khanyetso e ikhethang ea moaparo, botsitso ba mocheso le ts'ireletso ea kutu. SiC e tsebahala ka thepa ea eona e ikhethang ea 'mele le ea lik'hemik'hale, ho kenyeletsoa sebaka se phahameng sa ho qhibiliha (hoo e ka bang 2700 ℃), boima bo feteletseng (Mohs scale 9), ts'ebetso e babatsehang ea ho senya le ho thibela oxidation, le ts'ebetso e ikhethang ea ablation.
Melemo ea Bohlokoa ea Silicon Carbide Coating in Industrial Applications
Ka lebaka la likarolo tsena, ho roala ha silicon carbide ho sebelisoa haholo masimong a kang sefofane, lisebelisoa tsa libetsa le ts'ebetso ea semiconductor. Libakeng tse feteletseng, haholo-holo ka har'a 1800-2000 ℃, ho roala ha SiC ho bonts'a botsitso bo tsotehang ba mocheso le ho hanyetsa ablative, ho etsa hore e be e loketseng bakeng sa lisebelisoa tse phahameng tsa mocheso. Leha ho le joalo, silicon carbide feela ha e na botšepehi bo hlokahalang bakeng sa lits'ebetso tse ngata, kahoo mekhoa ea ho roala e sebelisoa ho matlafatsa thepa ea eona e ikhethang ntle le ho senya matla a motsoako. Ha ho etsoa li-semiconductor, likarolo tse koahetsoeng ke silicon carbide li fana ka tšireletso e tšepahalang le botsitso ba ts'ebetso ka har'a lisebelisoa tse sebelisoang mekhoeng ea MOCVD.
Mekhoa e Tloaelehileng bakeng sa Tokiso ea Liaparo tsa Silicon Carbide
Ⅰ● Kemiso ea Mouoane oa Lik'hemik'hale (CVD) Silicon Carbide Coating
Ka mokhoa ona, liaparo tsa SiC li thehoa ka ho beha li-substrates ka kamoreng ea ho itšoara, moo methyltrichlorosilane (MTS) e sebetsang e le selelekela. Tlas'a maemo a laoloang - ka tloaelo 950-1300 ° C le khatello e mpe - MTS e senyeha, 'me silicon carbide e kenngoa holim'a metsi. Ts'ebetso ena ea ho roala ha CVD SiC e tiisa hore ho na le seaparo se teteaneng, se ts'oanang se khomarelang hantle, se loketseng lits'ebetso tse nepahetseng haholo makaleng a semiconductor le a sefofane.
Ⅱ● Mokhoa oa ho Fetola Selelekela (Polymer Impregnation le Pyrolysis - PIP)
Tsela e 'ngoe e sebetsang ea ho roala ka silicon carbide spray ke mokhoa oa ho fetola selelekela, o kenyelletsang ho qoelisa sampole e seng e phekotsoe ka tharollo ea selelekela sa ceramic. Ka mor'a ho hloekisa tanka ea ho kenya le ho hatella seaparo, sampole ea futhumatsoa, e lebisang ho sebopeho sa silicon carbide ha ho pholile. Mokhoa ona o ratoa bakeng sa likarolo tse hlokang botenya ba ho roala ka mokhoa o ts'oanang le khanyetso e ntlafalitsoeng ea ho apara.
Thepa ea 'mele ea Silicon Carbide Coating
Liaparo tsa silicon carbide li bonts'a thepa e li etsang hore e be tse loketseng bakeng sa lits'ebetso tse hlokang indasteri. Lintho tsena li kenyelletsa:
Thermal Conductivity: 120-270 W/m·K
Coefficient ea Katoloso ea Thermal: 4.3 × 10^(-6)/K (ho 20~800℃)
Ho hanyetsa Motlakase: 10^5– 10^6Ω·cm
Boima: Mohs sekaleng sa 9
Lisebelisoa tsa Silicon Carbide Coating
Ha ho etsoa li-semiconductor, ho roala ha silicon carbide bakeng sa MOCVD le mekhoa e meng ea mocheso o phahameng ho sireletsa lisebelisoa tsa bohlokoa, tse kang li-reactors le li-susceptors, ka ho fana ka ho hanyetsa mocheso o phahameng le botsitso. Sebakeng sa sefofane le ts'ireletso, liphahlo tsa silicon carbide ceramic li sebelisoa ho likarolo tse tlamehang ho mamella tšusumetso e phahameng le tikoloho e senyang. Ho feta moo, pente ea silicon carbide kapa litlolo li ka sebelisoa le lisebelisoa tsa bongaka tse hlokang ho tšoarella tlas'a mekhoa ea sterilization.
Hobaneng u khetha Silicon Carbide Coating?
Ka rekoto e netefalitsoeng ea ho lelefatsa bophelo ba likarolo, liphahlo tsa silicon carbide li fana ka nako e telele e ke keng ea lekanngoa le botsitso ba mocheso, e leng se etsang hore e be le chelete e ngata bakeng sa tšebeliso ea nako e telele. Ka ho khetha sebaka se koahetsoeng ke silicon carbide, liindasteri li rua molemo ka litšenyehelo tse fokotsehileng tsa tlhokomelo, ts'epahalo e ntlafalitsoeng ea lisebelisoa, le ts'ebetso e ntlafalitsoeng ea ts'ebetso.
Ke Hobane'ng ha U Khetha VET ENERGY?
VET ENERGY ke moetsi ea hloahloa le feme ea lihlahisoa tsa silicon carbide naheng ea China. Lihlahisoa tse ka sehloohong tsa ho roala SiC li kenyelletsa heater ea silicon carbide ceramic coating,CVD Silicon Carbide Coating MOCVD Susceptor, MOCVD Graphite Carrier e nang le Coating ea CVD SiC, SiC Coated Graphite Base Carriers, Silicon Carbide Coated Graphite Substrate bakeng sa Semiconductor,SiC Coating / Coated Graphite Substrate/Tray bakeng sa Semiconductor, CVD SiC Coated Carbon-carbon Composite CFC Boat Mold. VET ENERGY e ikemiselitse ho fana ka theknoloji e tsoetseng pele le tharollo ea lihlahisoa bakeng sa indasteri ea semiconductor. Re tšepa ka tieo ho ba molekane oa hau oa nako e telele Chaena.
Nako ea poso: Sep-02-2023