Sic coating ke eng?

Silicon Carbideke motsoako o thata o nang le silicon le carbon, 'me o fumanoa ka tlhaho e le mineral moissanite e sa tloaelehang haholo. Likaroloana tsa silicon carbide li ka kopanngoa hammoho ka sintering ho etsa li-ceramics tse thata haholo, tse sebelisoang haholo lits'ebetsong tse hlokang nako e telele, haholo-holo mokolokong oa semiconductor.

Sebopeho sa 'mele sa SiC

Ho roala ha SiC ke silicon carbide e teteaneng, e sa senyeheng e nang le kutu e phahameng le e hanyetsanang le mocheso le mokhoa o babatsehang oa ho futhumatsa mocheso. Seaparo sena sa SiC se hloekileng haholo se sebelisoa indastering ea semiconductor le ea elektronike ho sireletsa lipalangoang tsa li-wafer, metheo le lisebelisoa tsa ho futhumatsa ho tloha libakeng tse senyang le tse sebetsang. Ho roala ha SiC ho boetse ho loketse libopi tsa vacuum le ho futhumatsa sampole sebakeng se phahameng sa vacuum, reactive le oksijene.

Bohloeki bo phahameng ba SiC ea ho roala holim'a metsi

Mokhoa oa ho roala SiC ke eng?

Karolo e tšesaane ea silicon carbide e behiloe holim'a substrate e sebelisoaCVD (Kemiso ea Mouoane oa lik'hemik'hale). Hangata deposition e etsoa ka mocheso oa 1200-1300 ° C 'me boitšoaro ba ho atolosa mocheso oa thepa ea substrate e lokela ho lumellana le ho roala ha SiC ho fokotsa khatello ea mocheso.

TŠEBELETSO EA KHRESTE EA CVD SIC FILM

CVD SIC Coating FILM CRYSTAL SEBOPEHO

Thepa ea 'mele ea ho roala ha SiC e bonahala haholo-holo ka ho hanyetsa mocheso o phahameng, ho thatafala, ho hanyetsa kutu le conductivity ea mocheso.

Li-parameter tse tloaelehileng hangata li tjena:

Ho thatafala: Ho roala ha SiC hangata ho na le Vickers Hardness ka har'a 2000-2500 HV, e ba fang moaparo o phahameng haholo le ho hanyetsa ts'ebetso lits'ebetsong tsa indasteri.

Botenya: Liaparo tsa SiC hangata li na le boima ba 3.1-3.2 g/cm³. Boima bo phahameng bo tlatsetsa ho matla a mechine le ho tšoarella ha ho roala.

Thermal conductivity: Liaparo tsa SiC li na le conductivity e phahameng ea mocheso, hangata ka har'a 120-200 W / mK (ho 20 ° C). Sena se fana ka conductivity e ntle ea mocheso libakeng tse phahameng tsa mocheso 'me se etsa hore e tšoanelehe ka ho khetheha bakeng sa lisebelisoa tsa phekolo ea mocheso indastering ea semiconductor.

Sebaka se qhibilihang: silicon carbide e na le ntlha ea ho qhibiliha hoo e ka bang 2730 ° C 'me e na le botsitso bo babatsehang ba mocheso mochesong o feteletseng.

Coefficient ea Katoloso ea Thermal: Liaparo tsa SiC li na le coefficient e tlase ea mola oa katoloso ea mocheso (CTE), hangata ka har'a 4.0-4.5 µm/mK (ka 25-1000 ℃). Sena se bolela hore botsitso ba eona bo boholo bo botle ho feta phapang e kholo ea mocheso.

Khanyetso ea kutu: Li-coatings tsa SiC li hanyetsa ka mokhoa o feteletseng ho bola sebakeng se matla sa acid, alkali le oxidizing, haholo-holo ha ho sebelisoa li-acids tse matla (tse kang HF kapa HCl), ho hanyetsa ha tsona ho feta hole tsa lisebelisoa tse tloaelehileng tsa tšepe.

Liaparo tsa SiC li ka sebelisoa ho lisebelisoa tse latelang:

Bohloeki bo phahameng ba isostatic graphite (CTE e tlase)
Tungsten
Molybdenum
Silicon Carbide
Silicon nitride
Lisebelisoa tsa Carbon-Carbon (CFC)

Lihlahisoa tse koahetsoeng ka SiC hangata li sebelisoa libakeng tse latelang:

Tlhahiso ea chip ea LED
Tlhahiso ea polysilicon
Semiconductorkgolo ya kristale
Silicon leSiC epitaxy
Wafer mocheso kalafo le etching

Hobaneng u khetha Matla a VET?

VET Energy ke moetsi ea ka sehloohong, moqapi le moetapele oa lihlahisoa tsa ho roala SiC Chaena, lihlahisoa tse ka sehloohong tsa SiC li kenyelletsasepalangoang se nang le seaparo sa SiC, SiC e koahetsoeepitaxial susceptor, Lesale la graphite le koahetsoeng ke SiC, Likarolo tsa halofo ea khoeli tse nang le seaparo sa SiC, SiC e entsoeng ka carbon-carbon composite, Seketsoana se koahetsoeng ke SiC, SiC e koahetsoeng ka heater, jj. VET Energy e ikemiseditse ho fa indasteri ya semiconductor thekenoloji ya ho qetela le ditharollo tsa dihlahiswa, le ho tshehetsa ditshebeletso tsa ho itlhophisa. Re labalabela ka tieo ho ba molekane oa hau oa nako e telele Chaena.