Ts'ebetso ea kholo ea kristale ea silicon carbide le theknoloji ea lisebelisoa

1. Tsela ea theknoloji ea ho hōla ha kristale ea SiC

PVT (mokhoa oa sublimation),

HTCVD (mocheso o phahameng oa CVD),

LPE(mokhoa oa mohato oa mokelikeli)

ke tse tharo tse tloaelehilengKhalase ea SiCmekhoa ea ho hōla;

Mokhoa o tsebahalang ka ho fetisisa indastering ke mokhoa oa PVT, 'me ho feta 95% ea likristale tse le mong tsa SiC li hōlileng ka mokhoa oa PVT;

Tsa indasteriKhalase ea SiCsebōpi sa kholo se sebelisa tsela ea theknoloji ea PVT ea indasteri.

2. Ts'ebetso ea kholo ea kristale ea SiC

Powder synthesis-seed crystal treatment-crystal growth-ingot annealing-sephaphathaho sebetsa.

3. Mokhoa oa ho hola oa PVTLikristale tsa SiC

Lisebelisoa tse tala tsa SiC li behiloe ka tlaase ho graphite crucible, 'me kristale ea peo ea SiC e ka holimo ho graphite crucible. Ka ho fetola ho kenya letsoho, mocheso oa thepa e tala ea SiC o phahame 'me mocheso oa kristale ea peo o tlaase. Thepa e tala ea SiC ka mocheso o phahameng oa sublimates le ho bola ho ba lintho tsa mohato oa khase, tse fetisetsoang ho kristale ea peo e nang le mocheso o tlase ebe o khanya ho etsa likristale tsa SiC. Ts'ebetso ea mantlha ea kholo e kenyelletsa lits'ebetso tse tharo: ho bola le ho fokotsa thepa e tala, ho fetisoa ka bongata, le kristale ho likristale tsa peo.

Ho bola le sublimation ea thepa e tala:

SiC(S)= Si(g)+C(S)

2SiC(S)= Si(g)+ SiC2(g)

2SiC(S)=C(S)+SiC2(g)

Nakong ea phetiso ea bongata, mouoane oa Si o tsoela pele ho sebetsana le lebota la graphite crucible ho theha SiC2 le Si2C:

Si(g)+2C(S) =SiC2(g)

2Si(g) +C(S)=Si2C(g)

Ka holim'a kristale ea peo, mekhahlelo e meraro ea khase e hola ka mekhoa e 'meli e latelang ho hlahisa likristale tsa silicon carbide:

SiC2_(g)+Si2C_(g)=3SiC_(s)

Si_(g)+SiC2_(g)=2SiC_(S)

4. Mokhoa oa PVT oa ho holisa tsela ea theknoloji ea SiC crystal growth equipment

Hona joale, ho futhumala ha induction ke tsela e tloaelehileng ea theknoloji bakeng sa mokhoa oa PVT SiC libōpi tsa ho hōla kristale;

Mocheso oa ho futhumatsa ka ntle oa li-coil le ho futhumatsa graphite ke tataiso ea nts'etsopele eaKhalase ea SiClibono tsa kholo.

5. 8-inch SiC induction futhumatsang sebōpi sa kgolo

(1) Ho futhumatsa mochesographite crucible ntho e futhumatsangka ho kenya matla a khoheli; ho laola sebaka sa mocheso ka ho lokisa matla a ho futhumatsa, boemo ba coil, le sebopeho sa ho kenya letsoho;

(2) Ho futhumatsa graphite crucible ka ho futhumala ha graphite le mocheso oa mahlaseli a mocheso; ho laola sebaka sa mocheso ka ho fetola mocheso oa mocheso oa graphite, sebopeho sa heater, le taolo ea hona joale ea libaka;