Ho roala ha SiC ho ka lokisoa ka lik'hemik'hale tsa mouoane oa lik'hemik'hale (CVD), phetoho ea selelekela, ho fafatsa ka plasma, joalo-joalo Ho roala ho lokiselitsoeng ke CHEMICAL mouoane deposition ke junifomo le diseke ee, 'me o na le designability e ntle. Ho sebelisa methyl trichlorsilane. (CHzSiCl3, MTS) e le mohloli oa silicon, ho roala ha SiC ho lokiselitsoeng ke mokhoa oa CVD ke mokhoa o batlang o hōlile oa ho sebelisoa ha seaparo sena.
Ho roala ha SiC le graphite li na le tšebelisano e ntle ea lik'hemik'hale, phapang ea coefficient ea ho atolosa mocheso pakeng tsa tsona e nyenyane, ho sebelisa SiC coating ho ka ntlafatsa ka katleho ho hanyetsa le ho hanyetsa oxidation ea thepa ea graphite. Har'a bona, karo-karolelano ea stoichiometric, mocheso oa karabelo, khase ea dilution, khase e sa hloekang le maemo a mang a na le tšusumetso e kholo ho karabelo.
Nako ea poso: Sep-14-2022