Recrystallizedsilicon carbide (RSiC) ceramicske alisebelisoa tsa ceramic tse sebetsang hantle. Ka lebaka la ho hanyetsa mocheso o phahameng o phahameng, khanyetso ea oxidation, ho hanyetsa kutu le boima bo phahameng, e 'nile ea sebelisoa haholo likarolong tse ngata, tse kang tlhahiso ea semiconductor, indasteri ea photovoltaic, libopi tsa mocheso o phahameng le lisebelisoa tsa lik'hemik'hale. Ka tlhokahalo e ntseng e eketseha ea lisebelisoa tse sebetsang hantle indastering ea sejoale-joale, lipatlisiso le nts'etsopele ea lirafshoa tse nchafalitsoeng tsa silicon carbide li ntse li teba.
1. Theknoloji ea ho itokisa eali-ceramics tsa silicon carbide tse nchafalitsoeng
Theknoloji ea ho itokisa ea recrystallizedli-ceramics tsa silicon carbidehaholo-holo e kenyelletsa mekhoa e 'meli: phofo ea sintering le mouoane deposition (CVD). Har'a bona, mokhoa oa sintering oa phofo ke ho sinter silicon carbide phofo tlas'a tikoloho e phahameng ea mocheso e le hore likaroloana tsa silicon carbide li thehe sebopeho se teteaneng ka ho hasana le ho kopanya hape pakeng tsa lijo-thollo. Mokhoa oa ho beha mouoane ke ho beha silicon carbide holim'a substrate ka karabelo ea mouoane oa lik'hemik'hale mochesong o phahameng, ka hona ho etsa filimi ea silicon carbide e hloekileng haholo kapa likarolo tsa sebopeho. Litheknoloji tsena tse peli li na le melemo ea tsona. Mokhoa oa sintering oa phofo o loketse tlhahiso e kholo 'me o na le litšenyehelo tse tlaase, ha mokhoa oa ho beha mouoane o ka fana ka bohloeki bo phahameng le mohaho o teteaneng,' me o sebelisoa haholo tšimong ea semiconductor.
2. Lintho tse bonahalang tsali-ceramics tsa silicon carbide tse nchafalitsoeng
Tšobotsi e ikhethang ea li-ceramics tsa silicon carbide ke ts'ebetso ea eona e ntle haholo maemong a mocheso o phahameng. Sebaka se qhibilihang sa thepa ena se phahametse 2700 ° C, 'me se na le matla a matle a mochine mocheso o phahameng. Ntle le moo, silicon carbide e nchafalitsoeng e boetse e na le khanyetso e ntle ea oxidation le ho hanyetsa kutu, 'me e ka lula e tsitsitse maemong a feteletseng a lik'hemik'hale. Ka hona, li-ceramics tsa RSiC li 'nile tsa sebelisoa haholo masimong a libopi tse nang le mocheso o phahameng, lisebelisoa tse thibelang mocheso o phahameng, le lisebelisoa tsa lik'hemik'hale.
Ho phaella moo, recrystallized silicon carbide e na le conductivity e phahameng ea mocheso 'me e khona ho tsamaisa mocheso ka katleho, e leng se etsang hore e be le boleng ba bohlokoa ba kopo.MOCVD reactorle lisebelisoa tsa kalafo ea mocheso ha ho etsoa semiconductor wafer. Ts'ebetso ea eona e phahameng ea mocheso le ho hanyetsa mocheso oa mocheso ho netefatsa ts'ebetso e ka tšeptjoang ea thepa tlas'a maemo a feteletseng.
3. Libaka tsa ts'ebeliso ea lirafshoa tsa silicon carbide tse nchafalitsoeng
Tlhahiso ea semiconductor: Ka indasteri ea semiconductor, li-ceramics tsa silicon carbide tse nchafalitsoeng li sebelisoa ho etsa li-substrates le litšehetso ho li-reactor tsa MOCVD. Ka lebaka la ho hanyetsa mocheso o phahameng, ho hanyetsa kutu, le mocheso o phahameng oa mocheso, thepa ea RSiC e ka boloka ts'ebetso e tsitsitseng libakeng tse rarahaneng tsa lik'hemik'hale tsa lik'hemik'hale, ho netefatsa boleng le chai ea li-wafers tsa semiconductor.
Indasteri ea Photovoltaic: Ka indasteri ea photovoltaic, RSiC e sebelisetsoa ho etsa mohaho oa tšehetso oa lisebelisoa tsa ho hōla ha kristale. Kaha khōlo ea kristale e lokela ho etsoa ka mocheso o phahameng nakong ea tlhahiso ea lisele tsa photovoltaic, ho hanyetsa mocheso oa recrystallized silicon carbide ho tiisa ts'ebetso e tsitsitseng ea nako e telele ea thepa.
Libōpi tsa mocheso o phahameng: Li-ceramics tsa RSiC li boetse li sebelisoa haholo libōping tsa mocheso o phahameng, tse kang linings le likaroloana tsa libopi tsa vacuum, libōpi tse qhibilihisang le lisebelisoa tse ling. Ho hanyetsa mocheso oa eona oa mocheso le ho hanyetsa oxidation ho etsa hore e be e 'ngoe ea lisebelisoa tse ke keng tsa nkeloa sebaka liindastering tse nang le mocheso o phahameng.
4. Tataiso ea lipatlisiso ea lirafshoa tsa silicon carbide tse nchafalitsoeng
Ka tlhokahalo e ntseng e hola ea lisebelisoa tse sebetsang hantle, tataiso ea lipatlisiso ea li-ceramics tsa silicon carbide tse ntlafalitsoeng e se e hlakile butle-butle. Patlisiso e tlang e tla shebana le lintlha tse latelang:
Ho ntlafatsa bohloeki ba lintho tse bonahalang: E le ho finyella litlhoko tse phahameng tsa bohloeki libakeng tsa semiconductor le photovoltaic, bafuputsi ba ntse ba hlahloba litsela tsa ho ntlafatsa bohloeki ba RSiC ka ho ntlafatsa theknoloji ea ho beha mouoane kapa ho hlahisa lisebelisoa tse ncha tse tala, kahoo ba ntlafatsa boleng ba ts'ebeliso ea bona masimong ana a theknoloji e phahameng. .
Ho ntlafatsa microstructure: Ka ho laola maemo a sintering le kabo ea likaroloana tsa phofo, microstructure ea recrystallized silicon carbide e ka ntlafatsoa le ho feta, kahoo e ntlafatsa thepa ea eona ea mechine le ho hanyetsa mocheso oa mocheso.
Lisebelisoa tse sebetsang: E le ho ikamahanya le maemo a ts'ebeliso e rarahaneng haholoanyane, bafuputsi ba leka ho kopanya RSiC le lisebelisoa tse ling ho hlahisa lisebelisoa tse nang le likarolo tse ngata, tse kang lisebelisoa tse entsoeng ka silicon carbide tse nang le lik'hamera tse phahameng tse hanyetsanang le motlakase.
5. Qetello
E le thepa e sebetsang hantle, li-ceramics tsa silicon carbide tse nchafalitsoeng li 'nile tsa sebelisoa haholo libakeng tse ngata ka lebaka la thepa ea tsona e babatsehang mocheso o phahameng, ho hanyetsa oxidation le ho hanyetsa kutu. Patlisiso ea nako e tlang e tla shebana le ho ntlafatsa bohloeki ba lintho tse bonahalang, ho ntlafatsa sebopeho sa microstructure le ho theha lisebelisoa tse sebetsang tse kopaneng ho fihlela litlhoko tse ntseng li hola tsa indasteri. Ka mekhoa ena e mecha ea theknoloji, li-ceramics tsa silicon carbide tse nchafalitsoeng li lebelletsoe ho bapala karolo e kholo masimong a theknoloji e phahameng haholoanyane.
Nako ea poso: Oct-24-2024