Ho roala ha SiC ho ka lokisoa ka lik'hemik'hale tsa mouoane oa lik'hemik'hale (CVD), phetoho ea selelekela, ho fafatsa ka plasma, joalo-joalo Ho roala ho lokiselitsoeng ke CHEMICAL mouoane deposition ke junifomo le diseke ee, 'me o na le designability e ntle. Ho sebelisa methyl trichlorsilane. (CHzSiCl3, MTS) joalo ka mohloli oa silicon, ho lokisoa ha SiC ...
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