MOKHOA OA HO ETSA SILICON WAFER

MOKHOA OA HO ETSA SILICON WAFER

A sephaphathake selae sa silicon se botenya ba 1 millimeter se nang le bokaholimo bo bataletseng haholo ka lebaka la lits'ebetso tse hlokang tekheniki haholo. Tšebeliso e latelang e etsa qeto ea hore na ke mokhoa ofe oa ho holisa kristale o lokelang ho sebelisoa. Ka mohlala, ts'ebetsong ea Czochralski, silicon ea polycrystalline e qhibiliha 'me kristale e tšesaane ea pentšele e kenngoa ka silicon e qhibilihisitsoeng. Joale kristale ea peō e pota-potiloe ebe e huloa butle-butle holimo. Ho hlahisa colossus e boima haholo, monocrystal. Hoa khoneha ho khetha litšobotsi tsa motlakase tsa monocrystal ka ho eketsa lihlopha tse nyenyane tsa li-dopants tse phahameng. Likristale li entsoe ho latela litlhaloso tsa bareki ebe lia belisoa ebe li khaola likotoana. Kamora mehato e fapaneng e fapaneng ea tlhahiso, moreki o fumana li-wafers tse boletsoeng ka har'a sephutheloana se ikhethileng, se lumellang moreki ho sebelisa sephaphatha hang-hang moleng oa sona oa tlhahiso.

TŠEBELETSO CZOCHRALSKI

Kajeno, karolo e kholo ea silicon monocrystals e hōlileng ho ea ka ts'ebetso ea Czochralski, e kenyelletsang ho qhibiliha polycrystalline high-purity silicon ka hyperpure quartz crucible le ho eketsa dopant (hangata B, P, As, Sb). Kristale e tšesaane ea peo ea monocrystalline e qoelisoa ka har'a silicon e qhibilihisitsoeng. Kristale e kholo ea CZ ebe e hlaha ho tsoa ho kristale ena e tšesaane. Taolo e nepahetseng ea mocheso le phallo ea silicon e qhibilihisitsoeng, ho potoloha ha kristale le crucible, hammoho le lebelo la ho hula ka kristale ho hlahisa monocrystalline silicon ingot ea boleng bo holimo haholo.

PHAPAMISA MOKHOA

Li-monocrystals tse entsoeng ho latela mokhoa oa float zone li loketse ho sebelisoa likarolong tsa semiconductor tsa matla, tse kang li-IGBT. Silicon ingot ea cylindrical polycrystalline e behiloe holim'a khoele ea induction. Sebaka sa radio frequency electromagnetic se thusa ho qhibilihisa silicon ho tloha karolong e ka tlase ea molamu. Tšimo ea electromagnetic e laola phallo ea silicon ka lesoba le lenyenyane ka har'a coil ea induction le ho kena ho monocrystal e ka tlase (mokhoa oa sebaka sa float). Doping, hangata e nang le B kapa P, e finyelloa ka ho eketsa lintho tse nang le khase.


Nako ea poso: Jun-07-2021
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