I. Patlisiso ea paramethara ea ts'ebetso
1. Tsamaiso ea TaCl5-C3H6-H2-Ar
2. Mocheso oa ho beha:
Ho latela foromo ea thermodynamic, ho baloa hore ha mocheso o le moholo ho feta 1273K, matla a mahala a Gibbs a karabelo a tlase haholo mme karabelo e batla e felile. Karabelo ea kamehla ea KP e kholo haholo ho 1273K mme e eketseha ka potlako ka mocheso, 'me sekhahla sa kholo se fokotseha butle ho 1773K.
Tšusumetso holim'a morphology ea ho roala: Ha mocheso o sa tšoanelehe (o phahame haholo kapa o tlaase haholo), bokaholimo bo hlahisa carbon morphology ea mahala kapa li-pores tse hlephileng.
(1) Ka mocheso o phahameng, lebelo la ho sisinyeha ha liathomo tse sebetsang kapa lihlopha tse sebetsang li potlakile haholo, tse tla lebisa ho arolelanoeng ho sa tšoaneng nakong ea ho bokella thepa, 'me libaka tse ruileng le tse futsanehileng li ke ke tsa fetoha hantle, tse hlahisang li-pores.
(2) Ho na le phapang lipakeng tsa sekhahla sa karabelo ea pyrolysis ea alkanes le sekhahla sa karabelo ea phokotso ea tantalum pentachloride. The pyrolysis carbon e fetelletseng 'me e ke ke ea kopanngoa le tantalum ka nako, e leng se etsang hore bokaholimo bo phuthetsoe ke carbon.
Ha mocheso o loketse, bokaholimo baHo roala ha TaCe teteaneng.
TaClikaroloana li qhibiliha 'me li kopane, sebopeho sa kristale se felile,' me moeli oa lijo-thollo o fetoha hantle.
3. Karolelano ea haedrojene:
Ho phaella moo, ho na le lintlha tse ngata tse amang boleng ba ho roala:
-Boleng ba bokaholimo ba substrate
- Sebaka sa ho beha khase
-Tekanyo ea ho tšoana ha khase e kopanyang
II. Mefokolo e tloaelehileng eaho roala ha tantalum carbide
1. Ho roala ho phunyeha le ho senya
CTE:
2. Tlhahlobo ea liphoso:
(1) Lebaka:
(2) Mokhoa oa ho khetholla sebopeho
① Sebelisa theknoloji ea X-ray diffraction ho lekanya khatello e setseng.
② Sebelisa molao oa Hu Ke ho lekanya khatello e setseng.
(3) Mekhoa e amanang le eona
3.Eketsa ho lumellana ha mechine ea ho roala le substrate
(1) Ho roala ka holim'a sefahleho sa in-situ
Thermal reaction deposition and diffusion technology TRD
Mokhoa oa letsoai o qhibilihisitsoeng
Nolofatsa mokhoa oa tlhahiso
Fokotsa mocheso oa karabelo
Theko e batlang e le tlase
Ho feta tikolohong
E loketse tlhahiso e kholo ea indasteri
(2) Ho roala ka motsoako oa phetoho
Mokhoa oa ho kopanya
CVDtshebetso
Ho roala ka likarolo tse ngata
Ho kopanya melemo ea karolo ka 'ngoe
Lokisa ka mokhoa o feto-fetohang sebopeho sa ho roala le ho lekana
4. Thermal reaction deposition and diffusion technology TRD
(1) Mokhoa oa ho itšoara
Theknoloji ea TRD e boetse e bitsoa embedding process, e sebelisang boric acid-tantalum pentoxide-sodium fluoride-boron oxide-boron carbide system ho lokisa.ho roala ha tantalum carbide.
① Boric acid e qhibilihisitsoeng e qhibilihisa tantalum pentoxide;
② Tantalum pentoxide e fokotsehile hore e be liathomo tse sebetsang tsa tantalum 'me e hasana holim'a graphite;
③ liathomo tse sebetsang tsa tantalum li khabisitsoe holim'a graphite 'me li kopana le liathomo tsa khabone ho theha.ho roala ha tantalum carbide.
(2) Senotlolo sa Maikutlo
Mofuta oa ho roala carbide o tlameha ho khotsofatsa tlhoko ea hore matla a mahala a oxidation a element a etsang carbide a phahame ho feta a boron oxide.
Matla a mahala a Gibbs a carbide a tlase ka ho lekaneng (ho seng joalo, boron kapa boride e ka thehoa).
Tantalum pentoxide ke oxide e sa nke lehlakore. Ka mocheso o phahameng oa mocheso oa borax, e ka itšoara ka alkaline oxide sodium oxide e matla ho theha sodium tantalate, kahoo e fokotsa mocheso oa pele oa ho itšoara.
Nako ea poso: Nov-21-2024