Nakong ea ts'ebetso ea vapor phase epitaxy (VPE), karolo ea pedestal ke ho tšehetsa substrate le ho netefatsa ho futhumala ho tšoanang nakong ea kholo. Mefuta e fapaneng ea li-pedestals e loketse maemo a fapaneng a ho hōla le mekhoa ea thepa. Tse latelang ke tse ling tsa mefuta ea pedestal e sebelisoang hangata mohatong oa mouoaneepitaxy:
Sebaka sa moqomo
Lithako tsa moqomo li sebelisoa hangata litsing tsa epitaxy tse tšekaletseng kapa tse sekameng. Ba ka tšoara substrate 'me ba lumella khase hore e phalle holim'a substrate, e thusang ho finyella khōlo e tšoanang ea epitaxial.
Pedestal e nang le sebopeho sa disc (pedestal e otlolohileng)
Li-pedestals tse nang le sebopeho sa disc li loketse tsamaiso ea epitaxy ea mouoane e otlolohileng, moo substrate e behoang ka holimo. Moqapi ona o thusa ho fokotsa sebaka sa ho kopana pakeng tsa substrate le susceptor, kahoo ho fokotsa tahlehelo ea mocheso le tšilafalo e ka bang teng.
Mohanyetsi o otlolohileng
Li-susceptors tse otlolohileng ha li tloaelehe haholo ho epitaxy ea mouoane, empa li ka sebelisoa lits'ebetsong tse itseng tsa kholo ho lumella kholo ea epitaxial ka tsela e rapameng.
Monolithic epitaxial reaction susceptor
Monolithic epitaxial reaction susceptor e etselitsoe substrate e le 'ngoe, e ka fanang ka taolo e nepahetseng ea mocheso le ho itšehla thajana ho molemo, e loketseng ho hola ha likhahla tsa epitaxial tsa boleng bo holimo.
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Nako ea poso: Jul-30-2024