Thepa e khethiloeng bakeng sa likarolo tse nepahetseng tsa mochini oa photolithography
Lebaleng la semiconductor,silicon carbide ceramiclisebelisoa li sebelisoa haholo lisebelisoa tsa bohlokoa bakeng sa tlhahiso e kopaneng ea potoloho, joalo ka silicon carbide worktable, rails ea tataiso,lihlaseli, chuck ea ho monya ka ceramic, matsoho, li-disc tsa ho sila, lisebelisoa, joalo-joalo bakeng sa mechine ea lithography.
Likarolo tsa silicon carbide ceramicbakeng sa lisebelisoa tsa semiconductor le optical
● Silicon carbide ceramic grinding disc. Haeba disc e sila e entsoe ka tšepe e entsoeng ka tšepe kapa carbon steel, bophelo ba eona ba tšebeletso bo khutšoanyane 'me coefficient ea eona ea ho atolosa mocheso e kholo. Nakong ea ts'ebetso ea li-wafers tsa silicon, haholo-holo nakong ea ho sila kapa ho belisoa ka lebelo le phahameng, ho senyeha ha mocheso le mocheso oa "grinding disc" ho etsa hore ho be thata ho netefatsa ho bata le ho tšoana ha sephaphatha sa silicon. Letlapa la ho sila le entsoeng ka li-ceramics tsa silicon carbide le na le bothata bo phahameng le ho apara ka tlaase, 'me coefficient ea ho atolosa mocheso e hlile e tšoana le ea liphaphatha tsa silicon, kahoo e ka siloa le ho belisoa ka lebelo le phahameng.
● Silicon carbide ceramic fixture. Ho phaella moo, ha li-wafers tsa silicon li hlahisoa, li hloka ho fumana phekolo ea mocheso o phahameng oa mocheso 'me hangata li tsamaisoa ka lisebelisoa tsa silicon carbide. Ha li na mocheso ebile ha li senyehe. Khabone e kang taemane (DLC) le litlolo tse ling li ka sebelisoa holim'a metsi ho ntlafatsa ts'ebetso, ho fokotsa tšenyo ea liphaphatha, le ho thibela tšoaetso hore e se ke ea ata.
● Silicon carbide worktable. Ho nka worktable mochine oa lithography e le mohlala, worktable ke haholo-holo e ikarabellang bakeng sa ho phethela motsamao oa ho pepeseha, o hlokang lebelo le phahameng, setorouku se seholo, sa tekanyo e tšeletseng ea tokoloho ea nano-level ultra-precision movement. Mohlala, bakeng sa mochini oa lithography o nang le qeto ea 100nm, ho nepahala ho fetang 33nm, le bophara ba mohala oa 10nm, ho nepahala ha boemo ba ho sebetsa hoa hlokahala ho fihlela 10nm, sephaphatha sa mask-silicon ho hata ka nako e le 'ngoe le lebelo la ho skena ke 150nm/s. le 120nm/s ka ho latellana, 'me lebelo la ho hlahloba mask le haufi le 500nm/s, 'me tafole ea mosebetsi e hlokahala hore e be le ho nepahala le botsitso bo phahameng haholo.
Setšoantšo sa moralo oa tafole e sebetsang le ea micro-motion (karolo e sa lekanyetsoang)
● Silicon carbide ceramic square seipone. Likarolo tsa bohlokoa ka har'a lisebelisoa tsa bohlokoa tse kopaneng tsa potoloho joalo ka metjhini ea lithography li na le libopeho tse rarahaneng, litekanyo tse rarahaneng, le meaho e bobebe e bobebe, e etsang hore ho be thata ho lokisa likarolo tse joalo tsa silicon carbide ceramic. Hajoale, baetsi ba lisebelisoa tsa potoloho tse kopaneng tsa machaba, joalo ka ASML ea Netherlands, NIKON le CANON Japane, ba sebelisa lisebelisoa tse ngata joalo ka khalase ea microcrystalline le cordierite ho lokisa liipone tse sekoere, likarolo tsa mantlha tsa mochini oa lithography, le ho sebelisa silicon carbide. li-ceramics ho lokisa likarolo tse ling tsa sebopeho se phahameng se nang le libopeho tse bonolo. Leha ho le joalo, litsebi tse tsoang Setsing sa Lipatlisiso sa Lisebelisuoa tsa Kaho tsa Chaena li sebelisitse theknoloji ea ho lokisetsa thepa ho finyella ho lokisetsa liipone tse nang le boholo bo boholo, tse rarahaneng, tse bobebe haholo, tse koaletsoeng ka ho feletseng tsa silicon carbide ceramic square le likarolo tse ling tsa sebopeho le tse sebetsang tsa optical bakeng sa mechine ea lithography.
Nako ea poso: Oct-10-2024