Tšebeliso le litšobotsi tsa silicon carbide CVD coating

Silicon carbide (SiC)ke thepa e tšoarellang haholo e tsejoang ka boima ba eona bo phahameng, conductivity e phahameng ea mocheso, le ho hanyetsa ho bola ha lik'hemik'hale. Har'a mekhoa e fapaneng ea ho sebelisa SiC holim'a metsi,Ho roala ha CVD SiC(Chemical Vapor Deposition of silicon carbide) e hlahella ka lebaka la bokhoni ba eona ba ho etsa liaparo tse ts'oanang, tse hloekileng haholo tse nang le sekhomaretsi se setle haholo. Theknoloji ena e bohlokoa bakeng sa lits'ebetso tse fapaneng tsa indasteri, haholo maemong a mocheso o phahameng le a thata a lik'hemik'hale.

Likopo tsa CVD SiC Coating

TheHo roala ha CVD SiCprocess e sebelisoa haholo liindastering tse 'maloa ka lebaka la ho feto-fetoha ha eona le melemo ea ts'ebetso. E 'ngoe ea lits'ebetso tsa mantlha ke tlhahisong ea li-semiconductor, moo likarolo tse koahetsoeng ke SiC li thusang ho sireletsa libaka tse bobebe nakong ea ts'ebetso ea li-wafer. Lisebelisoa tse koahetsoeng ke CVD SiC, tse kang li-susceptors, li-rings, le li-wafer carriers, li tiisa botsitso ba mocheso o phahameng le ho thibela tšilafalo nakong ea mekhahlelo ea bohlokoa ea tlhahiso.

Indastering ea lifofane,Ho roala ha CVD SiCe sebelisoa ho likarolo tse pepesehileng mocheso o feteletseng le khatello ea mochine. Ho roala ho lelefatsa bophelo ba mahare a turbine le likamore tse tukang, tse sebetsang tlas'a maemo a thata. Ho phaella moo, CVD SiC e atisa ho sebelisoa ha ho etsoa liipone le lisebelisoa tsa optical ka lebaka la thepa ea eona ea ho bonahatsa le ea mocheso.

Tšebeliso e 'ngoe ea bohlokoa ea CVD SiC ke indastering ea lik'hemik'hale. Mona, liphahlo tsa SiC li sireletsa likarolo tse kang li-exchangers tsa mocheso, litiiso le lipompo ho tsoa linthong tse senyang. Sebaka sa SiC se lula se sa amehe ke li-acids le metheo, e leng se etsang hore e be se loketseng bakeng sa libaka tseo ho tsona ho leng bohlokoa ho boloka lik'hemik'hale.

CVD Epitaxial Deposition Ka Barrel Reactor

Litšobotsi tsa CVD SiC Coating

Thepa ea CVD SiC coating ke eona e etsang hore e sebetse haholo lits'ebetsong tsena. E 'ngoe ea litšobotsi tsa eona tse ka sehloohong ke ho thatafala ha eona, ho behoa haufi le daemane ka tekanyo ea boima ba Mohs. Ho thatafala hona ho feteletseng ho fana ka liphahlo tsa CVD SiC tse hanyetsanang ka mokhoa o tsotehang oa ho roala le ho senya, ho etsa hore li tšoanelehe bakeng sa maemo a phahameng a khohlano.

Ho feta moo, SiC e na le conductivity e ntle ea mocheso, e lumellang likarolo tse koahetsoeng hore li boloke botšepehi ba tsona esita le tlas'a mocheso o phahameng. Sena se bohlokoa ka ho khetheha lits'ebetsong tsa semiconductor le aerospace, moo lisebelisoa li tlamehang ho mamella mocheso o feteletseng ha li ntse li boloka matla a sebopeho.

Ho se sebetse ha lik'hemik'hale tsa CVD SiC coating ke molemo o mong o hlokomelehang. E hanana le oxidation, corrosion, le liphetoho tsa lik'hemik'hale ka lintho tse mabifi, e leng se etsang hore e be sebaka se loketseng bakeng sa lisebelisoa tsa ho lokisa lik'hemik'hale. Ho feta moo, coefficient ea eona e tlaase ea katoloso ea mocheso e tiisa hore libaka tse koahetsoeng li boloka sebopeho sa tsona le ho sebetsa esita le tlas'a maemo a mocheso oa libaesekele.

Qetello

Ka kakaretso, ho roala ha CVD SiC ho fana ka tharollo e tšoarellang, e phahameng ea ts'ebetso bakeng sa liindasteri tse hlokang lisebelisoa tse ka mamellang mocheso o feteletseng, khatello ea mechine le ho senyeha ha lik'hemik'hale. Lisebelisoa tsa eona li tloha ho tlhahiso ea semiconductor ho ea ho aerospace le ts'ebetso ea lik'hemik'hale, moo thepa ea SiC-e kang ho thatafala, botsitso ba mocheso le lik'hemik'hale tsa lik'hemik'hale-li bohlokoa bakeng sa katleho ea ts'ebetso. Ha liindasteri li ntse li tsoela pele ho sutumelletsa meeli ea ts'ebetso le ts'epahalo, liphahlo tsa CVD SiC li tla lula e le theknoloji ea bohlokoa bakeng sa ho matlafatsa nako e telele ea likarolo le bophelo bo bolelele.

Ka ho phahamisa boiphihlelo ba bahlahisi ba ikhethileng joalo ka vet-china, lik'hamphani li ka fumana liphahlo tsa boleng bo holimo tsa CVD SiC tse fihlelang litlhoko tse thata tsa lits'ebetso tsa sejoale-joale tsa indasteri.


Nako ea poso: Dec-18-2023
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