Litlhoko tsa indasteri ea semiconductor ea litlhoko tsa thepa ea graphite li phahame ka ho khetheha, boholo ba karoloana e ntle ea graphite e na le ho nepahala ho phahameng, ho hanyetsa mocheso o phahameng, matla a phahameng, tahlehelo e nyenyane le melemo e meng, e kang: hlobo ea lihlahisoa tsa sintered graphite.Hobane lisebelisoa tsa graphite tse sebelisoang indastering ea semiconductor (ho kenyeletsoa li-heaters le li-sintered dies) li tlameha ho mamella mekhoa ea ho futhumatsa le ho pholisa khafetsa, e le ho lelefatsa bophelo ba ts'ebeletso ea lisebelisoa tsa graphite, hangata ho hlokahala hore lisebelisoa tsa graphite tse sebelisoang li be le ts'ebetso e tsitsitseng. le ts'ebetso e thibelang mocheso.
01 Lisebelisoa tsa graphite bakeng sa kholo ea kristale ea semiconductor
Mekhoa eohle e sebelisetsoang ho hōlisa likristale tsa semiconductor li sebetsa tlas'a mocheso o phahameng le tikoloho e senyang. Sebaka se chesang sa sebōpi sa khōlo ea kristale hangata se na le lisebelisoa tsa graphite tse thibelang mocheso le tse thibelang ho bola, tse kang heater, crucible, insulation cylinder, guide cylinder, electrode, crucible holder, electrode nut, joalo-joalo.
Re ka etsa likarolo tsohle tsa graphite tsa lisebelisoa tsa tlhahiso ea kristale, tse ka fanoang ka bomong kapa ka lihlopha, kapa likarolo tse ikhethileng tsa graphite tsa boholo bo fapaneng ho latela litlhoko tsa bareki. Boholo ba lihlahisoa bo ka lekanyetsoa setšeng, 'me molora oa lihlahisoa tse felileng o ka fokotsehaho feta 5ppm.
02 Lisebelisoa tsa graphite bakeng sa semiconductor epitaxy
Epitaxial process e bua ka kholo ea lera la kristale e le 'ngoe e nang le tlhophiso e ts'oanang ea lattice joalo ka substrate e holim'a substrate e le' ngoe ea kristale. Ts'ebetsong ea epitaxial, sephaphatha se kenngoa ka har'a graphite disk. Tshebetso le boleng ba graphite disk li phetha karolo ea bohlokoa boleng ba epitaxial layer ea sephaphatha. Lefapheng la tlhahiso ea epitaxial, ho hlokahala li-graphite tse ngata tsa ultra-high purity le setsi se phahameng sa bohloeki ba graphite se nang le SIC coating.
Setsi sa graphite sa k'hamphani ea rona bakeng sa semiconductor epitaxy se na le mefuta e mengata ea lisebelisoa, se ka bapisa boholo ba lisebelisoa tse sebelisoang hangata indastering, 'me se na le bohloeki bo phahameng, seaparo sa junifomo, bophelo bo botle ba tšebeletso, le khanyetso e phahameng ea lik'hemik'hale le botsitso ba mocheso.
03 Lisebelisoa tsa graphite bakeng sa ho kenngoa ha ion
Ho kenngoa ha ion ho bolela ts'ebetso ea ho potlakisa boloko ba plasma ea boron, phosphorus le arsenic ho matla a itseng, ebe o e kenya ka holim'a lera la lesela ho fetola thepa ea bokaholimo. Likarolo tsa sesebelisoa sa ho kenngoa ha ion li tla etsoa ka lisebelisoa tse phahameng tsa bohloeki tse nang le mocheso o motle oa ho hanyetsa mocheso, conductivity ea mocheso, ho senyeha ho fokolang ho bakoang ke ion ea ion le litaba tse fokolang tse sa hloekang. Graphite e hloekileng e finyella litlhoko tsa kopo, 'me e ka sebelisoa bakeng sa tube ea sefofaneng, li-slits tse fapa-fapaneng, li-electrode, likoahelo tsa li-electrode, li-conduits, li-terminator tsa beam, joalo-joalo tsa lisebelisoa tsa ho kenngoa ha ion.
Re ke ke ra fana feela ka sekoahelo sa graphite shielding bakeng sa mechine e fapaneng ea ho kenngoa ha ion, empa hape re fana ka li-electrode tse phahameng tsa graphite le mehloli ea ion e nang le khanyetso e phahameng ea kutu ea litlhaloso tse fapaneng. Mefuta e sebetsang: Eaton, Azcelis, Quatum, Varian, Nissin, AMAT, LAM le lisebelisoa tse ling. Ho phaella moo, re ka boela ra fana ka ceramic e tšoanang, tungsten, molybdenum, lihlahisoa tsa aluminium le likarolo tse koahetsoeng.
04 Lisebelisoa tsa ho kenya graphite le tse ling
Lisebelisoa tsa ho kenya mocheso tse sebelisoang thepa ea tlhahiso ea semiconductor li kenyelletsa graphite e thata, e bonolo, foil ea graphite, pampiri ea graphite le ropo ea graphite.
Lisebelisoa tsohle tsa rona tse tala ke graphite e tsoang linaheng tse ling, e ka khaoloang ho ea ka boholo bo itseng ba litlhoko tsa bareki kapa ea rekisoa ka kakaretso.
Tray ea carbon-carbon e sebelisoa e le sejari sa ho roala filimi ts'ebetsong ea tlhahiso ea silicon ea letsatsi ea monocrystalline le lisele tsa polycrystalline silicon. Molao-motheo oa ts'ebetso ke: kenya chip ea silicon ka har'a terei ea CFC 'me u e romele ka har'a tube ea sebōpi ho sebetsana le ho roala filimi.
