Tantalum carbide dahaarka dahaarka leh ee wafer

Sharaxaad Gaaban:

Semicera waa hogaamiyaha tignoolajiyada ilaalinta agabka heerkulka sare waxaanan ku hanweynahay inaanu soo bandhigno alaabada daahan CVD Tantalum Carbide (TaC) si loo helo ilaalin heerkul sare ah oo la isku halayn karo oo loogu talagalay substrate-yada garaafyadaada.Graphite waa walxo heerkul sare oo heer sare ah u adkaysta, laakiin waxay u nugul tahay oksaydhka heerkulka sare, kaas oo aan si buuxda looga fogaan karin xitaa foornada faakuumka.Dahaarkayaga CVD Tantalum Carbide (TaC) wuxuu si wax ku ool ah uga hortagi karaa oksaydhka substrate-ka garaafka iyadoo la ilaalinayo waxqabadkeeda heerkul sare ee heersare ah.TaC sidoo kale waa walxo aan firfircooneyn oo iska caabin kara falcelinta gaasaska sida argon iyo hydrogen.La tasho Semicera maanta si aad wax badan uga ogaato Tantalum Carbide CVD dahaarka EPI-ga si aad u hubiso xasiloonida iyo isku halaynta codsiyadaada heerkulka sare.