Silicon Carbide Dahaarka Wafer Susceptor Disc

Sharaxaad Gaaban:

VET Energy Silicon carbide dahaarka leh wafer susceptor disc waa badeecad wax qabad sare leh oo loogu talagalay in lagu bixiyo waxqabad joogto ah oo la isku halayn karo muddo dheer. Waxay leedahay caabbinta kulaylka wanaagsan iyo lebiska kulaylka, nadiif sare, caabbinta nabaad-guurka, taas oo ka dhigaysa xalka ugu fiican ee codsiyada wax-qabadka wafer.


Faahfaahinta Alaabta

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Silicon Carbide Wafer Disc waa qayb muhiim ah oo loo isticmaalo hababka wax soo saarka semiconductor ee kala duwan. Waxaan u isticmaalnaa tignoolajiyadayada rukhsadda leh si aan uga dhigno saxanka silikoon carbide ammaan leh oo nadiif ah oo aad u sarreeya, lebbiska dahaarka wanaagsan iyo nolosha adeeg aad u wanaagsan, iyo sidoo kale iska caabbinta kiimikada sare iyo guryaha xasilloonida kuleylka.

VET Energy waa soo saaraha dhabta ah ee garaafyada la habeeyay iyo alaabada silikoon carbide leh dahaaryo kala duwan sida SiC, TaC, carbon pyrolytic, galaas-carbon, iwm, waxay bixin kartaa qaybo kala duwan oo loo habeeyey semiconductor iyo warshadaha sawir-qaadista. Kooxdayada farsamo waxay ka yimaadaan hay'adaha cilmi-baarista gudaha ee ugu sarreeya, waxay ku siin karaan xalal qalab xirfadeed oo dheeraad ah adiga.

Waxaan si joogto ah u horumarinaa habab horumarsan si aan u bixinno qalab aad u horumarsan, waxaanan ka shaqeynay tignoolajiyada gaarka ah ee patented, taas oo ka dhigi karta isku xidhka dahaarka iyo substrate-ka mid adag oo u nugul goynta.

FCunista alaabtayada:

1. Iska caabbinta oksaydhka heerkulka sare ilaa 1700.
2. daahir sare iyolebbiska kulaylka
3. iska caabin daxalka heer sare ah: acid, alkali, cusbo iyo reagents organic.
4. Adag sare, oogada is haysta, qaybo yaryar.
5. Cimri dheer oo adeeg iyo waarta

CVD SiC薄膜基本物理性能

Tilmaamaha asaasiga ah ee CVD SiCdaahan

性质 / Hanti

典型数值 / Qiimaha caadiga ah

晶体结构 / Dhismaha Crystal

FCC β wejiga多晶,主要为(111) 取向

密度 / Cufnaanta

3.21 g/cm³

硬度 / Adag

2500 维氏硬度(500g oo culeys ah

晶粒大小 / Hadhuudhka Size

2 ~ 10μm

纯度 / Nadiifnimada Kiimikada

99.99995%

热容 / Awoodda kulaylka

640 · kg-1·K-1

升华温度 / Heerkulka Sublimation

2700 ℃

抗弯强度 / Xoog Jilicsan

415 MPa RT 4-dhibic

杨氏模量 /Dhallinyarada Modulus

430 Gpa 4pt laab, 1300 ℃

导热系数 / ThermalHab-dhaqanka

300W·m-1·K-1

热膨胀系数 / Balaadhinta kulaylka (CTE)

4.5×10-6K-1

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