Vet-ShiinahaSilicon Carbide CeramicDahaarku waa dahaarka ilaalinta waxqabadka sare leh oo ka samaysan mid aad u adag oo u adkaysta xidhashadaSilicon carbide (SiC)maaddada, taas oo bixisa iska caabbinta daxalka kiimikaad aad u fiican iyo xasilloonida heerkulka sare. Tilmaamahan ayaa muhiim u ah wax soo saarka semiconductor, sidaas darteedDahaarka dhoobada ee Silicon Carbidewaxaa si weyn loogu isticmaalaa qaybaha muhiimka ah ee qalabka wax soo saarka semiconductor.
Doorka gaarka ah ee Vet-ChinaSilicon Carbide CeramicDahaarka wax soo saarka semiconductor waa sida soo socota:
Kordhi cimriga qalabka:Silicon Carbide Ceramic Coating Silicon Carbide Ceramic Coating wuxuu bixiyaa ilaalin dusha sare ah oo aad u fiican qalabka wax soo saarka semiconductor iyadoo ay aad u adag tahay oo ay xirto iska caabin. Gaar ahaan heerkul sare iyo jawi habsocod aad u wasakhaysan, sida kaydinta uumiga kiimikada (CVD) iyo plazma etching, dahaarka ayaa si wax ku ool ah uga hortagi kara dusha sare ee qalabka inuu waxyeelo u geysto nabaad-guurka kiimikaad ama xirashada jirka, taas oo si weyn u kordhineysa nolosha adeegga Qalabka iyo dhimista wakhtiga dhimista ee ay sababto beddelka iyo dayactirka joogtada ah.
Hagaajinta nadiifinta nidaamka:Habka wax-soo-saarka semiconductor, faddarayn yar ayaa sababi karta cilladaha alaabta. Daah-furnaanta kiimikada ee Silicon Carbide Ceramic Coating waxay u oggolaaneysaa inay ku xasilloonaato xaaladaha daran, ka hortagga walxaha inay sii daayaan walxaha ama wasakhda, si loo hubiyo nadiifnimada deegaanka ee habka. Tani waxay si gaar ah muhiim ugu tahay tillaabooyinka wax soo saarka ee u baahan saxnaanta sare iyo nadaafad sare, sida PECVD iyo ion implantation.
Hagaajinta maaraynta kulaylka:Ka-hortagga heer-kulka-sare ee semiconductor, sida ka-hortagga kuleylka degdegga ah (RTP) iyo geeddi-socodka oksaydheynta, kuleylka kuleylka sarreeya ee Dahaarka dhoobada ee Silicon Carbide wuxuu awood u leeyahay qaybinta heerkulka isku midka ah ee gudaha qalabka. Tani waxay kaa caawinaysaa yaraynta diiqada kulaylka iyo qallafsanaanta walxaha ay keento isbedbeddelka heerkulka, taas oo hagaajinaysa saxnaanta wax-soo-saarka alaabta iyo joogtaynta.
Taageer deegaan habsocodka adag:Nidaamyada u baahan xakamaynta jawiga adag, sida ICP etching iyo hababka etching PSS, xasiloonida iyo iska caabbinta oksaydhka ee Silicon Carbide Ceramic Coating waxay hubisaa in qalabku uu ilaaliyo waxqabadka xasilloon ee hawlgalka muddada dheer, yaraynta khatarta alaabta wasakhda ama dhaawaca qalabka isbeddellada deegaanka.
CVD SiC薄膜基本物理性能 Tilmaamaha asaasiga ah ee CVD SiCdaahan | |
性质 / Hanti | 典型数值 / Qiimaha caadiga ah |
晶体结构 / Dhismaha Crystal | FCC β wejiga多晶,主要为(111) 取向 |
密度 / Cufnaanta | 3.21 g/cm³ |
硬度 / Adag | 2500 维氏硬度(500g oo culeys ah |
晶粒大小 / Hadhuudhka Size | 2 ~ 10μm |
纯度 / Nadiifnimada Kiimikada | 99.99995% |
热容 / Awoodda kulaylka | 640 · kg-1·K-1 |
升华温度 / Heerkulka Sublimation | 2700 ℃ |
抗弯强度 / Xoog Jilicsan | 415 MPa RT 4-dhibic |
杨氏模量 /Dhallinyarada Modulus | 430 Gpa 4pt laab, 1300 ℃ |
导热系数 / ThermalHab-dhaqanka | 300W·m-1·K-1 |
热膨胀系数 / Balaadhinta kulaylka (CTE) | 4.5×10-6K-1 |
Si diiran kuugu soo dhawoow inaad soo booqato warshadeena, aynu wada hadal dheeraad ah yeelano!