kuleyliyaha dahaarka dhoobada silicon carbide

Sharaxaad Gaaban:

Sida xirfadle soo saaraha Silicon Carbide Ceramic Coating Coating iyo alaab-qeybiyaha Shiinaha, Vet-China's Silicon Carbide Ceramic Coating waxaa si weyn loogu isticmaalaa qaybaha muhiimka ah ee qalabka wax soo saarka semiconductor, gaar ahaan marka CVD iyo hababka PECVD ay ku lug leeyihiin. Vet-China waxay ku takhasustay wax soo saarka iyo bixinta wax-qabadka sare ee Silicon Carbide Ceramic Coating, waxayna ka go'an tahay inay bixiso tignoolajiyada horumarsan iyo xalalka wax soo saarka warshadaha semiconductor. Ku soo dhawoow su'aalahaaga.


Faahfaahinta Alaabta

Tags Product

Vet-ShiinahaSilicon Carbide CeramicDahaarku waa dahaarka ilaalinta waxqabadka sare leh oo ka samaysan mid aad u adag oo u adkaysta xidhashadaSilicon carbide (SiC)maaddada, taas oo bixisa iska caabbinta daxalka kiimikaad aad u fiican iyo xasilloonida heerkulka sare. Tilmaamahan ayaa muhiim u ah wax soo saarka semiconductor, sidaas darteedDahaarka dhoobada ee Silicon Carbidewaxaa si weyn loogu isticmaalaa qaybaha muhiimka ah ee qalabka wax soo saarka semiconductor.

Doorka gaarka ah ee Vet-ChinaSilicon Carbide CeramicDahaarka wax soo saarka semiconductor waa sida soo socota:

Kordhi cimriga qalabka:Silicon Carbide Ceramic Coating Silicon Carbide Ceramic Coating wuxuu bixiyaa ilaalin dusha sare ah oo aad u fiican qalabka wax soo saarka semiconductor iyadoo ay aad u adag tahay oo ay xirto iska caabin. Gaar ahaan heerkul sare iyo jawi habsocod aad u wasakhaysan, sida kaydinta uumiga kiimikada (CVD) iyo plazma etching, dahaarka ayaa si wax ku ool ah uga hortagi kara dusha sare ee qalabka inuu waxyeelo u geysto nabaad-guurka kiimikaad ama xirashada jirka, taas oo si weyn u kordhineysa nolosha adeegga Qalabka iyo dhimista wakhtiga dhimista ee ay sababto beddelka iyo dayactirka joogtada ah.

Hagaajinta nadiifinta nidaamka:Habka wax-soo-saarka semiconductor, faddarayn yar ayaa sababi karta cilladaha alaabta. Daah-furnaanta kiimikada ee Silicon Carbide Ceramic Coating waxay u oggolaaneysaa inay ku xasilloonaato xaaladaha daran, ka hortagga walxaha inay sii daayaan walxaha ama wasakhda, si loo hubiyo nadiifnimada deegaanka ee habka. Tani waxay si gaar ah muhiim ugu tahay tillaabooyinka wax soo saarka ee u baahan saxnaanta sare iyo nadaafad sare, sida PECVD iyo ion implantation.

Hagaajinta maaraynta kulaylka:Ka-hortagga heer-kulka-sare ee semiconductor, sida ka-hortagga kuleylka degdegga ah (RTP) iyo geeddi-socodka oksaydheynta, kuleylka kuleylka sarreeya ee Dahaarka dhoobada ee Silicon Carbide wuxuu awood u leeyahay qaybinta heerkulka isku midka ah ee gudaha qalabka. Tani waxay kaa caawinaysaa yaraynta diiqada kulaylka iyo qallafsanaanta walxaha ay keento isbedbeddelka heerkulka, taas oo hagaajinaysa saxnaanta wax-soo-saarka alaabta iyo joogtaynta.

Taageer deegaan habsocodka adag:Nidaamyada u baahan xakamaynta jawiga adag, sida ICP etching iyo hababka etching PSS, xasiloonida iyo iska caabbinta oksaydhka ee Silicon Carbide Ceramic Coating waxay hubisaa in qalabku uu ilaaliyo waxqabadka xasilloon ee hawlgalka muddada dheer, yaraynta khatarta alaabta wasakhda ama dhaawaca qalabka isbeddellada deegaanka.

dahaarka dhoobada silicon carbide
Kuleyliyaha garaafka (4)

CVD SiC薄膜基本物理性能

Tilmaamaha asaasiga ah ee CVD SiCdaahan

性质 / Hanti

典型数值 / Qiimaha caadiga ah

晶体结构 / Dhismaha Crystal

FCC β wejiga多晶,主要为(111) 取向

密度 / Cufnaanta

3.21 g/cm³

硬度 / Adag

2500 维氏硬度(500g oo culeys ah

晶粒大小 / Hadhuudhka Size

2 ~ 10μm

纯度 / Nadiifnimada Kiimikada

99.99995%

热容 / Awoodda kulaylka

640 · kg-1·K-1

升华温度 / Heerkulka Sublimation

2700 ℃

抗弯强度 / Xoog Jilicsan

415 MPa RT 4-dhibic

杨氏模量 Modulka da'da yar

430 Gpa 4pt laab, 1300 ℃

导热系数 / ThermalHab-dhaqanka

300W·m-1·K-1

热膨胀系数 / Balaadhinta kulaylka (CTE)

4.5×10-6K-1

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