Graphite leh daahan TaC

I. Habka sahminta halbeegga

1. Nidaamka TaCl5-C3H6-H2-Ar

2. heerkulka dhigaalka:

Marka loo eego qaacidada thermodynamic, waxaa la xisaabiyaa in marka heerkulku ka weyn yahay 1273K, tamarta xorta ah ee Gibbs ee falcelinta ay aad u hooseyso falcelintuna ay tahay mid dhameystiran. Celceliska joogtada ah ee KP aad ayuu u weyn yahay 1273K wuxuuna si degdeg ah u kordhaa heerkulka, heerka kobacana wuxuu si tartiib tartiib ah hoos ugu dhacayaa 1773K.

Saamaynta qaab-dhismeedka dusha sare ee daahan: Marka heerkulku aanu ku habboonayn (aad u sarreeya ama aad u hooseeya), dusha sare wuxuu soo bandhigayaa qaab-dhismeedka kaarboonka oo bilaash ah ama dalool dabacsan.

(1) Heerkulka sare, xawaaraha dhaqdhaqaaqa dhaqdhaqaaqa falcelinta firfircoon ee atomiyada ama kooxaha waa mid aad u dhakhso badan, taas oo u horseedi doonta qaybinta aan sinnayn inta lagu jiro ururinta alaabta, iyo meelaha hodanka ah iyo kuwa saboolka ah ma si habsami leh u wareejin karaan, taasoo keentay daloolo.

(2) Waxaa jira farqi u dhexeeya heerka falcelinta pyrolysis ee alkanes iyo hoos u dhigista heerka falcelinta tantalum pentachloride. Kaarboonka pyrolysis waa xad-dhaaf ah oo aan lagu dari karin tantalum wakhtiga, taasoo keentay in dusha sare uu ku duubo kaarboon.

Marka heerkulku ku habboon yahay, dusha sare eeDaahan TaCwaa cufan.

TaCQaybaha dhalaaliyaa oo isu geeyaan midba midka kale, qaabka crystal waa dhameystiran yahay, iyo xuduudda hadhuudh u ​​gudubto si habsami leh.

3. Saamiga hydrogen:

Intaa waxaa dheer, waxaa jira arrimo badan oo saameeya tayada daahan:

-Substrate tayada dusha sare

-Beerta gaasta dhigata

-Heerka isku mid ahaanshaha gaaska falcelinta

II. Cilladaha caadiga ah eedahaarka tantalum carbide

1. Dahaarka dildilaaca iyo diirinta

Xidhiidhiyaha fidinta kulaylka toosan ee CTE:

2. Falanqaynta cilladda:

(1) Sabab:

(2) Habka sifada

① Isticmaal tignoolajiyada kala fogaynta raajada si aad u cabbirto culayska haraaga ah.

② Isticmaal sharciga Hu Ke si aad u qiyaasto culayska haraaga ah.

(3) Qaababka la xiriira

3. Kor u qaadida iswaafajinta farsamada ee daahan iyo substrate-ka

(1) Dusha sare ee dahaarka koritaanka goobta

Dhigista falcelinta kulaylka iyo farsamada faafinta TRD

Habka milixda dhalaalay

Fududeynta habka wax soo saarka

Hoos u dhig heerkulka falcelinta

Marka la barbardhigo qiimaha jaban

In badan oo deegaanka u saaxiib ah

Ku habboon wax soo saarka warshadaha ballaaran

(2) Daahan kala guurka isku dhafan

Habka wax dhigista

CVDhabka

Dahaarka qaybaha badan

Isku darka faa'iidooyinka qayb kasta

Si dabacsanaan leh u hagaaji halabuurka daahan iyo saamiga

4. Dhigista falcelinta kulaylka iyo farsamada faafinta TRD

(1) Habka falcelinta

Tiknoolajiyada TRD waxa kale oo loo yaqaan habka isku dhejinta, kaas oo isticmaala boric acid-tantalum pentoxide-sodium fluoride-boron oxide-boron carbide system si loo diyaariyodahaarka tantalum carbide.

① boric acid oo dhalaalaysa waxay milmaan tantalum pentoxide;

② Tantalum pentoxide waxaa lagu yareeyaa atamka tantalum ee firfircoon waxayna ku faafisaa dusha garaafka;

③ Atomyada tantalum ee firfircoon ayaa lagu dhajiyaa dusha garaafka waxayna la falgalaan atamka kaarboon si ay u sameeyaan.dahaarka tantalum carbide.

(2) Furaha falcelinta

Nooca dahaarka carbide waa in uu buuxiyaa shuruudaha ah in samaynta oksaydhisku tamarta xorta ah ee curiyaha samaynayo carbide uu ka sarreeyo kan boron oxide.

Tamarta bilaashka ah ee Gibbs ee karbidhidu aad ayay u yar tahay (haddii kale, boron ama boride waa la samayn karaa).

Tantalum pentoxide waa oksaydh dhexdhexaad ah. Borax dhalaalaysa heerkul sare, waxay la falgali kartaa alkaline oxide sodium oxide xooggan si ay u samayso sodium tantalate, taaso hoos u dhigaysa heerkulka falcelinta bilowga ah.